Abstract: An annulus assembly including a central fluid channel for flow of a central fluid therethrough, a circumferential fluid channel surrounding the central fluid channel, and a first thermal insulation layer intermediate the central fluid channel and the circumferential fluid channel, for direct fluid contact with the central fluid.

Abstract: A pipe coupling assembly, including a first portion having a first channel therethrough and a second channel substantially coaxial with and separated from the first channel, and a second portion rotatably connected to the first portion, wherein the second portion has a first channel substantially aligned with the first channel of the first portion and a second channel substantially aligned with the second channel of the first portion.

Abstract: An annulus assembly including a central fluid channel for flow of a central fluid therethrough, a circumferential fluid channel surrounding the central fluid channel, and a first thermal insulation layer intermediate the central fluid channel and the circumferential fluid channel, for direct fluid contact with the central fluid.

Abstract: A pipe coupling assembly, including a first portion having a first channel therethrough and a second channel substantially coaxial with and separated from the first channel, and a second portion rotatably connected to the first portion, wherein the second portion has a first channel substantially aligned with the first channel of the first portion and a second channel substantially aligned with the second channel of the first portion.

Abstract: A solar receiver is provided. The solar receiver may include a receiver housing with front and rear ends. The solar receiver may also include a window configured to allow radiation to pass therethrough. The window may be mounted at the front end and project within the housing. The solar receiver may also include a receiver chamber defined between the housing and the window. The receiver chamber may include a working fluid inlet for ingress of working fluid to be heated therewithin, and a working fluid outlet for egress therethrough of the heated working fluid. The solar receiver may also include a solar radiation absorber configured for absorbing the radiation and heating the working fluid thereby. The absorber may be located within the receiver chamber and may surround at least a portion of the window. The solar radiation absorber may be formed with projections.

Abstract: A method for manufacturing a solar absorber element forming a solar absorber of a solar receiver including providing a substrate, placing at least one projection within the substrate, and attaching the projection to the substrate with an attachment functionality operative to attach the projection to the substrate, thus defining the solar absorber element, the solar absorber being configured to allow a fluid to flow therein and be heated by solar radiation penetrating the projection of the solar absorber element.

Abstract: A solar thermal system comprising at least one solar system including a solar system working fluid flowing therethrough, and a solar receiver for heating the solar system working fluid by solar radiation admitted into the solar receiver, and a thermal energy system in fluid communication with the solar system and receiving the heated solar system working fluid so as to produce thermal energy.

Abstract: A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of the pump. The pump also has a pump inlet port, the inlet port being coupled to the vacuum chamber port disposed at the first axial end of the pump, and an exit port disposed proximate the second axial end of the pump. The assembly vibration damper is structured to enclose a substantial portion of the pump in a nested arrangement.

Abstract: The invention provides an apparatus and a method for directing gas towards a specimen, said apparatus includes: (i) means for directing a beam of charged particles towards the specimen; and (ii) a gas conduit providing gas to an area of incidence of said beam of charged particles onto said specimen. The gas conduit includes an intermediate portion having a first end for receiving the inert gas and a substantially sealed second end. The intermediate portion has a first and second apertures that are positioned such as to define a space through which the beam of charged particles can propagate. The intermediate portion is shaped such as to allow a first portion of the inert gas to exit the second aperture and to allow a second portion of the gas to propagate towards the second end and to be returned through the second aperture.

Abstract: The invention provides an apparatus and a method for directing gas towards a specimen, said apparatus includes: (i) means for directing a beam of charged particles towards the specimen; and (ii) a gas conduit providing gas to an area of incidence of said beam of charged particles onto said specimen. The gas conduit includes an intermediate portion having a first end for receiving the inert gas and a substantially sealed second end. The intermediate portion has a first and second apertures that are positioned such as to define a space through which the beam of charged particles can propagate. The intermediate portion is shaped such as to allow a first portion of the inert gas to exit the second aperture and to allow a second portion of the gas to propagate towards the second end and to be returned through the second aperture.

Abstract: A process chamber for processing or inspecting a substrate such as a semiconductor wafer and the like includes a internal chamber employing dynamic seals at the interface of relatively moving elements. In one embodiment, the internal chamber has a first element, such as a lid or cover, and a second element, such as the body of the chamber. The first element and the second element meet at the interface. The internal chamber may further include a substrate support, mounted inside the internal chamber, supporting a substrate. A first movement system may produce at least one type of relative movement between the first element and the second element. A second movement system may produce second relative movement between the second element and the substrate support. The resulting structure allows movement of the chamber, while maintaining pressure inside the chamber.

Abstract: A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of the pump. The pump also has a pump inlet port, the inlet port being coupled to the vacuum chamber port disposed at the first axial end of the pump, and an exit port disposed proximate the second axial end of the pump. The assembly vibration damper is structured to enclose a substantial portion of the pump in a nested arrangement.

Abstract: A process chamber for processing or inspecting a substrate such as a semiconductor wafer and the like includes a internal chamber employing dynamic seals at the interface of relatively moving elements. In one embodiment, the internal chamber has a first element, such as a lid or cover, and a second element, such as the body of the chamber. The first element and the second element meet at the interface. The internal chamber may further include a substrate support, mounted inside the internal chamber, supporting a substrate. A first movement system may produce at least one type of relative movement between the first element and the second element. A second movement system may produce second relative movement between the second element and the substrate support. The resulting structure allows movement of the chamber, while maintaining pressure inside the chamber.