Patents by Inventor Hahn Park

Hahn Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Removal apparatus for removing residual gas and substrate treating facility including the same
    Patent number: 10892171
    Abstract: A removal apparatus for removing residual gases and a substrate treating facility for removing residual gases is disclosed. The residual gas removal apparatus includes a housing, a gas supply for providing a non-reactive gas into the housing, a supporting member provided to support a substrate and positioned in the housing, a heat radiating member spaced apart from the supporting member and positioned in the housing, and a heating unit for providing heat toward the supporting member and positioned between the heat radiating member and the supporting member.
    Type: Grant
    Filed: December 30, 2017
    Date of Patent: January 12, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Heokjae Lee, Hahn Park, Jae Boo Kim, Dongil Yoon, MinYoung Hwang, Se Un Park, Kang-Min Park, Yongjoon Hong, Sung Baek Kim, Woo Jin Park
  • REMOVAL APPARATUS FOR REMOVING RESIDUAL GAS AND SUBSTRATE TREATING FACILITY INCLUDING THE SAME
    Publication number: 20180247836
    Abstract: A removal apparatus for removing residual gases and a substrate treating facility for removing residual gases is disclosed. The residual gas removal apparatus includes a housing, a gas supply for providing a non-reactive gas into the housing, a supporting member provided to support a substrate and positioned in the housing, a heat radiating member spaced apart from the supporting member and positioned in the housing, and a heating unit for providing heat toward the supporting member and positioned between the heat radiating member and the supporting member.
    Type: Application
    Filed: December 30, 2017
    Publication date: August 30, 2018
    Inventors: Heokjae LEE, Hahn PARK, Jae Boo KIM, Dongil YOON, MinYoung HWANG, Se Un PARK, Kang-Min PARK, Yongjoon HONG, Sung Baek KIM, Woo Jin PARK
  • Industrial gripper with multiple degrees of freedom
    Patent number: 8424942
    Abstract: An industrial gripper includes a base plate, at least three finger units to be moved relative to the base plate, a supporting unit to support the finger units, a first drive unit coupled to the supporting unit to allow simultaneous angular displacement of the finger units toward an object, and a second drive unit coupled to the supporting unit to adjust orientation angles between the finger units. Each of the finger units includes an intermediation member to be moved in a first direction by the first drive unit, a grip member to grip the object by being moved in a second direction different from the first direction as a movement direction of the intermediation member, and a connection member to convert the first direction movement of the intermediation member into the second direction movement of the grip member.
    Type: Grant
    Filed: December 14, 2010
    Date of Patent: April 23, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hahn Park, Sung Wook Jung, Jae Chul Hwang, Yong Won Choi
  • Industrial gripper with multiple degrees of freedom
    Publication number: 20110148132
    Abstract: An industrial gripper includes a base plate, at least three finger units to be moved relative to the base plate, a supporting unit to support the finger units, a first drive unit coupled to the supporting unit to allow simultaneous angular displacement of the finger units toward an object, and a second drive unit coupled to the supporting unit to adjust orientation angles between the finger units. Each of the finger units includes an intermediation member to be moved in a first direction by the first drive unit, a grip member to grip the object by being moved in a second direction different from the first direction as a movement direction of the intermediation member, and a connection member to convert the first direction movement of the intermediation member into the second direction movement of the grip member.
    Type: Application
    Filed: December 14, 2010
    Publication date: June 23, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hahn Park, Sung Wook Jung, Jae Chul Hwang, Yong Won Choi