Patents by Inventor Hahn Seok JEON

Hahn Seok JEON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220153030
    Abstract: The present invention provides an apparatus for treating a substrate, the apparatus including: a head unit including a head formed with one or more nozzles that discharge a treatment liquid to a substrate; and a head maintenance unit configured to perform maintenance for the head, in which the head maintenance unit may include: a liquid receiving block formed with one or more liquid receiving parts having liquid receiving spaces with open tops; a decompression line fluidly-communicating with the liquid receiving space and configured to provide reduced pressure to the liquid receiving space; and a decompression valve installed in the decompression line.
    Type: Application
    Filed: November 18, 2021
    Publication date: May 19, 2022
    Inventors: Byung Joo LEE, Sang Hwa LEE, Dong Yun LEE, Jee Yong JUNG, Hahn Seok JEON, Kang KWON, Jae Hun JEONG, Sang Hoon KIM