Patents by Inventor Haijing Peng

Haijing Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REFLECTIVE COMPACT LENS FOR MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEM
    Publication number: 20220137380
    Abstract: A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.
    Type: Application
    Filed: October 19, 2021
    Publication date: May 5, 2022
    Inventors: Alex ZHENG, Jun WANG, David Y. WANG, Chunxia LI, Changfei YAN, Rui NI, Lansheng DONG, Yang ZHOU, Hai-Yang YOU, Haijing PENG, Walter H. JOHNSON, Shankar KRISHNAN, Jianou SHI
  • Magneto-optic Kerr effect metrology systems
    Patent number: 11043239
    Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: June 22, 2021
    Assignee: KLA Corporation
    Inventors: Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong, Yang Zhou, Hai-Yang You, Haijing Peng, Jianou Shi, Rui Ni, Shankar Krishnan, David Y. Wang, Walter H. Johnson
  • MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEMS
    Publication number: 20200302965
    Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.
    Type: Application
    Filed: March 17, 2020
    Publication date: September 24, 2020
    Inventors: Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong, Yang Zhou, Hai-Yang You, Haijing Peng, Jianou Shi, Rui Ni, Shankar Krishnan, David Y. Wang, Walter H. Johnson, Barry Blasenheim
  • Variable spacing four-point probe pin device and method
    Patent number: 9435826
    Abstract: A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
    Type: Grant
    Filed: May 6, 2013
    Date of Patent: September 6, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Walter H. Johnson, Jianou Shi, Lansheng Dong, Haijing Peng, Xianghua Liu, Jiazhou Jin, Zhuoxian Zhang, Nanchang Zhu
  • VARIABLE SPACING FOUR-POINT PROBE PIN DEVICE AND METHOD
    Publication number: 20130300445
    Abstract: A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
    Type: Application
    Filed: May 6, 2013
    Publication date: November 14, 2013
    Inventors: Walter H. Johnson, Jianou Shi, Lansheng Dong, Haijing Peng, Xianghua Liu, Jiazhou Jin, Zhuoxian Zhang, Nanchang Zhu