Patents by Inventor Hailing Tu

Hailing Tu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vapor controlled czochralski (VCZ) single crystal growth apparatus
    Patent number: 6720509
    Abstract: The present invention relates to semiconductor crystal growth equipments. A vapor controlled czochralski (VCZ) single crystal growth apparatus comprises a single crystal furnace, a heating unit, a mechanical transmission unit, and a gaseous adjustment unit. A hot-wall sealed container is mounted in the single crystal furnace, and a crucible is mounted within the hot-wall sealed container. The hot-wall sealed container includes an upper container part and a lower container part. A sealing connection device is provided between the upper and lower container parts. A crucible-transmitting shaft and a seed shaft are inserted into the hot-wall sealed container through respective sealing devices.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: April 13, 2004
    Assignee: General Research Institute for Nonferrous Metals
    Inventors: Hailing Tu, Yonghong Wang, Jiayu Qian, Ping Song, Fengyi Zhang
  • Vapor controlled czochralski (VCZ) single crystal growth apparatus
    Publication number: 20020144648
    Abstract: The present invention relates to semiconductor crystal growth equipments. A vapor controlled czochralski (VCZ) single crystal growth apparatus comprises a single crystal furnace, a heating unit, a mechanical transmission unit, and a gaseous adjustment unit. A hot-wall sealed container is mounted in the single crystal furnace, and a crucible is mounted within the hot-wall sealed container. The hot-wall sealed container includes an upper container part and a lower container part. A sealing connection device is provided between the upper and lower container parts. A crucible-transmitting shaft and a seed shaft are inserted into the hot-wall sealed container through respective sealing devices.
    Type: Application
    Filed: October 26, 2001
    Publication date: October 10, 2002
    Applicant: General Research Institute For Nonferrous Metal
    Inventors: Hailing Tu, Yonghong Wang, Jiayu Qian, Ping Song, Fengyi Zhang