Abstract: Described herein is a method, and system for training a deblurring model and deblurring an image (e.g., SEM image) of a patterned substrate using the deblurring model and depth data associated with multiple layers of the patterned substrate. The method includes obtaining, via a simulator using a target pattern as input, a simulated image of the substrate, the target pattern comprising a first target feature to be formed on a first layer, and a second target feature to be formed on a second layer located below the first layer; determining, based on depth data associated with multiple layers of the substrate, edge range data for features of the substrate; and adjusting, using the simulated image and the edge range data associated with the target pattern as training data, parameters of a base model to generate the deblurring model to a deblur image of a captured image.

Abstract: Described herein is a method for training a denoising model. The method includes obtaining a first set of simulated images based on design patterns. The simulated images may be clean and can be added with noise to generate noisy simulated images. The simulated clean and noisy images are used as training data to generate a denoising model.

Abstract: A method and system of distributed communication of independent autonomous vehicles to provide redundancy and performance are disclosed. In one embodiment, a set of autonomous vehicles operates in a geographically proximate area through which peer-to-peer communication sessions are established between nearby ones of the set of autonomous vehicles through an ad-hoc network based on a present geo-spatial location of each one of the set of autonomous vehicles in communication proximity to preferred adjacent ones of the set of autonomous vehicles. A central server directly coupled to each of the set of autonomous vehicles establishes centralized communication paths with each of the set of autonomous vehicles through a wide area network. The centralized server processes a communication from adjacent ones of the set of autonomous vehicles when an error condition is detected in an operational mode of a non-functional vehicle that has lost communication with the central server.

Abstract: A method and system of distributed communication of independent autonomous vehicles to provide redundancy and performance are disclosed. In one embodiment, a set of autonomous vehicles operates in a geographically proximate area through which peer-to-peer communication sessions are established between nearby ones of the set of autonomous vehicles through an ad-hoc network based on a present geo-spatial location of each one of the set of autonomous vehicles in communication proximity to preferred adjacent ones of the set of autonomous vehicles. A central server directly coupled to each of the set of autonomous vehicles establishes centralized communication paths with each of the set of autonomous vehicles through a wide area network. The centralized server processes a communication from adjacent ones of the set of autonomous vehicles when an error condition is detected in an operational mode of a non-functional vehicle that has lost communication with the central server.