Abstract: Methods and apparatus for processing a substrate are provided herein. For example, an RF power delivery compensation circuit comprises a first input configured to receive an RF forward power from an RF power source connected to a processing chamber and a second input configured to receive an RF delivered power from a matching network connected between the RF power source and the processing chamber. The RF power delivery compensation circuit calculates an RF forward power compensation factor based on the RF forward power and the RF delivered power for adjusting the RF forward power delivered to the processing chamber during operation.

Abstract: A bidirectional power converter includes a first switch circuit coupled to a second switch circuit via a transformer, wherein the first switch circuit is configured to transfer power to the second switch circuit during a charging mode, the second switch circuit is configured to transfer power to the first switch circuit during a discharging mode, and the first switch circuit is configured to operate in a half bridge configuration during a first portion of the charging mode.

Abstract: The present invention discloses a triterpenoids high yielding strain of Antrodia cinnamomea and use thereof. The accession number of the Antrodia cinnamomea strain with a high triterpenoids yield is CCTCC M2013359. As for the strain mycelium, the growth rate is fast, the triterpenoids output is high, and the genetic properties are stable, so the strain mycelium is suitable for industrialized fermentation. Compared with the original strain, the mycelium output under a liquid culturing condition is increased by more than 1.5 times, and the intracellular triterpenoids output is increased by 2 to 3 times, the fermentation period is shortened to 65 hours compared with the original more than 10 days; and the total triterpenoids output under a solid culturing condition is increased by 1 to 2 times, and the fermentation period is shortened to 10 days compared with the original more than 90 days.