Patents by Inventor Hajime Abiko
Hajime Abiko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240087929Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.Type: ApplicationFiled: November 20, 2023Publication date: March 14, 2024Inventors: Tomoyuki MIYADA, Hajime ABIKO, Junichi KAWASAKI, Tadashi OKAZAKI
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Patent number: 11876010Abstract: There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.Type: GrantFiled: March 17, 2020Date of Patent: January 16, 2024Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Tadashi Okazaki, Hajime Abiko, Tomoyuki Miyada, Yukinao Kaga
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Patent number: 11869785Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.Type: GrantFiled: January 14, 2022Date of Patent: January 9, 2024Assignee: Kokusai Electric CorporationInventors: Tomoyuki Miyada, Hajime Abiko, Junichi Kawasaki, Tadashi Okazaki
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Publication number: 20230238263Abstract: According to one aspect of the technique of the present disclosure, there is provided a method of displaying substrate arrangement data, including: (a) setting each of a transport parameter for determining at least an arrangement of substrates to be loaded into a substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer; (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a); and (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer.Type: ApplicationFiled: March 27, 2023Publication date: July 27, 2023Inventors: Yuna SUIZU, Hajime ABIKO, Susumu NISHIURA, Mitsuru FUNAKURA, Takuya KATO
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Publication number: 20230221699Abstract: There is provided a technique that includes at least one load port capable of mounting a substrate storage container that stores a substrate, a controller configured to be capable of performing: a switching control to switch a first function of using the at least one load port to load or unload the substrate storage container and a second function of mounting the substrate storage container on the at least one load port; and an erroneous operation prevention control to execute an erroneous operation prevention operation to the substrate storage container arranged on the at least one load port according to use modes associated with the first function and the second function; and a process chamber configured to process the substrate.Type: ApplicationFiled: December 27, 2022Publication date: July 13, 2023Applicant: Kokusai Electric CorporationInventors: Susumu NISHIURA, Hajime ABIKO
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Publication number: 20220139745Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.Type: ApplicationFiled: January 14, 2022Publication date: May 5, 2022Inventors: Tomoyuki MIYADA, Hajime ABIKO, Junichi KAWASAKI, Tadashi OKAZAKI
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Publication number: 20220100176Abstract: There is provided a configuration that includes: at least one transfer mechanism configured to transfer a substrate and at least one processing mechanism configured to process the substrate; an earthquake detector configured to detect an earthquake; and a controller configured to control the at least one transfer mechanism and the at least one processing mechanism according to a detection result of the earthquake detector, wherein the controller is configured to be capable of performing a stopping operation of the at least one transfer mechanism according to a P wave (initial tremor wave) and an S wave (principal fluctuation wave).Type: ApplicationFiled: September 24, 2021Publication date: March 31, 2022Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Susumu NISHIURA, Kenichi MAEDA, Hiroyuki KITAMOTO, Hajime ABIKO
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Patent number: 11257699Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.Type: GrantFiled: January 28, 2020Date of Patent: February 22, 2022Assignee: Kokusai Electric CorporationInventors: Tomoyuki Miyada, Hajime Abiko, Junichi Kawasaki, Tadashi Okazaki
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Publication number: 20200219745Abstract: There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.Type: ApplicationFiled: March 17, 2020Publication date: July 9, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Tadashi OKAZAKI, Hajime ABIKO, Tomoyuki MIYADA, Yukinao KAGA
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Publication number: 20200168491Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.Type: ApplicationFiled: January 28, 2020Publication date: May 28, 2020Inventors: Tomoyuki MIYADA, Hajime ABIKO, Junichi KAWASAKI, Tadashi OKAZAKI
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Patent number: 10062592Abstract: A substrate processing apparatus includes a substrate retaining mechanism; a detecting unit detecting a placed state of the substrate retained by the substrate retaining mechanism; a first determination unit comparing detection data of the substrate obtained by the detecting unit with master data that is a reference to determine if the detection data is within a first allowed value; a confirmation unit confirming substrate type; a second determination unit comparing the detection data of the substrate with the master data to determine if the detection data is within a second allowed value; and a transfer control unit controlling the substrate retaining mechanism depending on a determination result of the second determination unit when substrate type is confirmed as a predetermined type by the confirmation unit when it is determined that the detection data is not within the first allowed value as determined by the first determination unit.Type: GrantFiled: January 30, 2017Date of Patent: August 28, 2018Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Junichi Kawasaki, Hajime Abiko
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Publication number: 20170140963Abstract: A substrate processing apparatus includes a substrate retaining mechanism; a detecting unit detecting a placed state of the substrate retained by the substrate retaining mechanism; a first determination unit comparing detection data of the substrate obtained by the detecting unit with master data that is a reference to determine if the detection data is within a first allowed value; a confirmation unit confirming substrate type; a second determination unit comparing the detection data of the substrate with the master data to determine if the detection data is within a second allowed value; and a transfer control unit controlling the substrate retaining mechanism depending on a determination result of the second determination unit when substrate type is confirmed as a predetermined type by the confirmation unit when it is determined that the detection data is not within the first allowed value as determined by the first determination unit.Type: ApplicationFiled: January 30, 2017Publication date: May 18, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Junichi KAWASAKI, Hajime ABIKO
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Patent number: 9558976Abstract: A substrate processing apparatus includes a substrate retaining mechanism into which retaining members on which substrates are placed are installed to retain the substrates; a substrate transfer unit configured to transfer at least one substrate; a detecting unit configured to detect states of the retaining members installed into the substrate retaining mechanism; a determination unit configured to compare data representing the states of the retaining members, which is obtained by the detecting unit, with master data, which is reference data obtained by detecting normal states of the retaining members, beforehand to determine the states of the retaining members; and a transfer control unit configured to control the substrate transfer unit according to the determination of the determination unit.Type: GrantFiled: March 7, 2013Date of Patent: January 31, 2017Assignee: Hitachi Kokusai Electric Inc.Inventors: Junichi Kawasaki, Hajime Abiko
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Publication number: 20130238113Abstract: A substrate processing apparatus includes a substrate retaining mechanism into which retaining members on which substrates are placed are installed to retain the substrates; a substrate transfer unit configured to transfer at least one substrate; a detecting unit configured to detect states of the retaining members installed into the substrate retaining mechanism; a determination unit configured to compare data representing the states of the retaining members, which is obtained by the detecting unit, with master data, which is reference data obtained by detecting normal states of the retaining members, beforehand to determine the states of the retaining members; and a transfer control unit configured to control the substrate transfer unit according to the determination of the determination unit.Type: ApplicationFiled: March 7, 2013Publication date: September 12, 2013Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Junichi Kawasaki, Hajime Abiko
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Publication number: 20020142758Abstract: A message communication device, typically a mobile telephone, includes menu information creating means that creates menu information including received message sender identification information listed in a prescribed order for display to the user and accept means that accepts user designation of items among the sender identification information to be subjected to prescribed processing.Type: ApplicationFiled: January 7, 2002Publication date: October 3, 2002Inventors: Hajime Abiko, Tokuji Yoneyama