Abstract: A valve for semiconductor manufacturing device is provided in which an excessive surface pressure to the valve seat is prevented to improve durability. The valve main body (1) has a duplexed structure in which, a load distributing member (10) is arranged in serial to the valve seat (7) inside of the opening/closing mechanism (8) of the valve main body (1) while a thrust produced by the opening/closing mechanism (8) is maintained, a fastening load required is received as being distributed to the valve seat (7) and the load distributing member (10).

Abstract: A valve for semiconductor manufacturing device is provided in which an excessive surface pressure to the valve seat is prevented to improve durability. The valve main body (1) has a duplexed structure in which, a load distributing member (10) is arranged in serial to the valve seat (7) inside of the opening/closing mechanism (8) of the valve main body (1) while a thrust produced by the opening/closing mechanism (8) is maintained, a fastening load required is received as being distributed to the valve seat (7) and the load distributing member (10).

Abstract: To provide a fluid control valve for use under high-temperature conditions and capable of achieving high durability and Cv value stability even with many operations, and a method of assembling the fluid control valve, a fluid control valve includes an annular valve seat provided inside a body having an inflow port and an outflow port and a diaphragm opposed to the annular valve seat to be in contact therewith or away therefrom by an ascending/descending motion of an actuator rod or a manual rod. A contact surface, which is an upper surface of the annular valve seat, to be in contact with and away from the diaphragm has a tapered surface formed along a centripetal direction of the annular valve seat.

Abstract: To provide a fluid control valve for use under high-temperature conditions and capable of achieving high durability and Cv value stability even with many operations, and a method of assembling the fluid control valve, a fluid control valve includes an annular valve seat provided inside a body having an inflow port and an outflow port and a diaphragm opposed to the annular valve seat to be in contact therewith or away therefrom by an ascending/descending motion of an actuator rod or a manual rod. A contact surface, which is an upper surface of the annular valve seat, to be in contact with and away from the diaphragm has a tapered surface formed along a centripetal direction of the annular valve seat.