Abstract: Method of forming a complex, minute three-dimensional structure, known as micromachining, which includes forming a plurality of thin films at least one of which is provided as a temporary layer composed of a lower layer made of an organic material and an upper layer made of an amphoteric metal material which is formed on the lower layer; and selectively removing the temporary layer to provide a three-dimensional structure. The temporary layer may comprise a composite sacrificial layer of photoresist and aluminum.

Abstract: An ink jet head includes an orifice plate having a plurality of orifices disposed transversely at prescribed intervals, a vibrating plate disposed parallel to orifice plate and deformed by applying a potential difference perpendicularly to the direction of polarization, and a plurality of partitions disposed between orifice plate and vibrating plate in the space between adjacent orifices, and the space surrounded by orifice, vibrating plate and partition defines a pressure chamber to be filled with ink. Vibrating plate is provided with a groove having a rectangular cross section in a region having relatively low field intensity when signal voltage is applied. In this structure, the electric capacitance of vibrating plate is reduced without adversely affecting the electric field intensity, and the efficiency of deformation of vibrating plate is increased.

Abstract: An ink jet printer performs a control of a supply of electric power for each heating element based on a temperature dependency of a resistance value by monitoring its resistance value while ink is being discharged. Accordingly, the ink jet printer permits a damage of the heating element and a discharge inferior caused by a difference in characteristics in heating elements, ambient temperature, etc., to be suppressed. Additionally, as the temperature of the heating element is not detected directly, the ink jet printer permits high speed control of the electric value, thereby permitting high speed printing.

Abstract: A pressure generating member applies a pressure to an ink, the member having a symmetric configuration and including a buckling body. The buckling body may include a radially extending ribbed portion on its upper surface and no buckling layer beneath it. A heater layer is interposed between insulating layers for heating the buckling body, the buckling body having its peripheral edge portion fixed on a substrate. A center portion of the buckling body is buckled by being heated. An orifice plate is arranged so as to cover the pressure generating member with interposition of a gap defining a cavity for the ink. The orifice plate is provided with a nozzle serving as an ink discharge outlet located in a portion of the orifice plate opposite to the pressure generating member.