Abstract: An input device includes a display and a processor. The display includes a screen. The processor is configured to cause the screen to display a first key layout in which a set of numeric keys is arranged in a first arrangement. The processor is also configured to perform a first determination of whether a part on the screen is specified. The processor is also configured to, if a first part of the screen has been specified, cause the screen to display a second key layout in which the set of numeric keys is arranged in a second arrangement. The processor is also configured to receive, based on an operation on the first key layout or the second key layout, an input of at least one input numeric key of the numeric keys.

Abstract: An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

Abstract: A driving method for a piezoelectric vibrator including a driving piezoelectric element and a detection piezoelectric element formed of the same material as a material of the driving piezoelectric element, for driving the piezoelectric vibrator by applying, to the driving piezoelectric element, an alternating voltage having a frequency close to a resonance frequency of the piezoelectric vibrator, the driving method including, in the case where it is detected based on variations in output detected from the detection piezoelectric element that at least one of variations in mechanical resistance of the piezoelectric vibrator and variations in piezoelectric characteristic of a piezoelectric element have occurred, applying an alternating voltage adjusted in accordance with the variations in mechanical resistance of the piezoelectric vibrator and/or the variations in piezoelectric characteristic of the piezoelectric element, to thereby adjust an electrical input to the piezoelectric vibrator to suppress variations

Abstract: An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

Abstract: An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

Abstract: A driving method for a piezoelectric vibrator including a driving piezoelectric element and a detection piezoelectric element formed of the same material as a material of the driving piezoelectric element, for driving the piezoelectric vibrator by applying, to the driving piezoelectric element, an alternating voltage having a frequency close to a resonance frequency of the piezoelectric vibrator, the driving method including, in the case where it is detected based on variations in output detected from the detection piezoelectric element that at least one of variations in mechanical resistance of the piezoelectric vibrator and variations in piezoelectric characteristic of a piezoelectric element have occurred, applying an alternating voltage adjusted in accordance with the variations in mechanical resistance of the piezoelectric vibrator and/or the variations in piezoelectric characteristic of the piezoelectric element, to thereby adjust an electrical input to the piezoelectric vibrator to suppress variations

Abstract: An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

Abstract: A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.

Abstract: An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus includes a light source for generating a plasma, said light source including a condenser mirror that condenses a light irradiated from the plasma, an illumination optical system for illuminating the mask using the light condensed by the condenser mirror, a detector that is provided between the condenser mirror and the illumination optical system, said detector detecting a property of the light, and a changing part for changing a state of the plasma based on a detected result of the detector.

Abstract: An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus includes a light source for generating a plasma, said light source including a condenser mirror that condenses a light irradiated from the plasma, an illumination optical system for illuminating the mask using the light condensed by the condenser mirror, a detector that is provided between the condenser mirror and the illumination optical system, said detector detecting a property of the light, and a changing part for changing a state of the plasma based on a detected result of the detector.

Abstract: A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.

Abstract: A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.

Abstract: A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band from the decreased intensity light and a detector for detecting a light intensity of the light with a desired wavelength band is disclosed. Then, a spectrum intensity distribution (spectrum) is obtained by (a) a plural opening is located in the extinction member, and the light from the EUV light source passes through the plural opening at the same time, or (b) the detector detects the light volume of the light with a desired wavelength band as thermal energy.

Abstract: An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus includes a light source for generating a plasma, said light source including a condenser mirror that condenses a light irradiated from the plasma, an illumination optical system for illuminating the mask using the light condensed by the condenser mirror, a detector that is provided between the condenser mirror and the illumination optical system, said detector detecting a property of the light, and a changing part for changing a state of the plasma based on a detected result of the detector.

Abstract: A vibration type driving apparatus, which is capable of increase of output torque and rotational speed without increasing the size of a vibration body, is described. The apparatus comprises a vibration body which generates vibration by supplying a driving signal to an electro-mechanical energy converting element and a contact body which contacts this vibration body and is moved by vibration received from the vibration body. The vibration body comprises a base portion having the electro-mechanical energy converting element and a plurality of vibration amplification portions for amplifying vibration generated at this base portion. Neighboring vibration amplification portions of the plurality of vibration amplification portions are connected at a position different from a connecting position of each vibration amplification portion with the base portion.

Abstract: An EUV light intensity distribution measuring device for measuring the angular distribution of intensity of EUV light emitted from an EUV light source. The EUV light has a center point of divergence. The EUV light intensity distribution measuring device includes a plurality of first EUV light detecting units. These units are movably disposed at different positions on a substantially spherical plane centered on the center point of divergence of the EUV light so as to allow at least adjacent first EUV light detecting units to detect EUV light at a substantially same position on the spherical plane. Thus, an EUV light intensity distribution measurement device and an EUV light intensity distribution measurement method, capable of precisely measuring the angular distribution of the intensity within the EUV light emitted from the EUV light source are provided.

Abstract: A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.

Abstract: A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band from the decreased intensity light and a detector for detecting a light intensity of the light with a desired wavelength band is disclosed. Then, a spectrum intensity distribution (spectrum) is obtained by (a) a plural opening is located in the extinction member, and the light from the EUV light source passes through the plural opening at the same time, or (b) the detector detects the light volume of the light with a desired wavelength band as thermal energy.

Abstract: A light intensity distribution measuring apparatus for measuring a light intensity distribution in light with a wavelength of 20 nm or smaller emitted from a light source includes plural light intensity detector units each including a mirror and a photoelectric conversion element, and measures the light intensity distribution so that an incident angle of the light incident upon the mirror is a predetermined angle.

Abstract: A vibration type driving apparatus which is capable of increase of output torque and rotational speed without increasing the size of a vibration body, is described. The apparatus comprises a vibration body which generates vibration by supplying a driving signal to an electro-mechanical energy converting element and a contact body which contacts this vibration body and is driven by vibration received from the vibration body. The vibration body comprises a base portion having the electro-mechanical energy converting element and a plurality of vibration amplification portions for amplifying vibration generated at this base portion. The plurality of vibration amplification portions are connected between neighboring vibration amplification portions in the driving direction of the contact body.