Abstract: A method of non-destructive inspection of a subject body including an element is comprised of irradiating the subject body with a neutron ray through a first measurement point and a second measurement point; measuring an elapsed time after a first time point when a resonant neutron specific to the element passes through the first measurement point and before a second time point when a prompt gamma ray made emitted by the resonant neutron from the subject body is detected at the second measurement point; and determining a location of the element in the subject body by the first measurement point, the second measurement point, a relative position toward a surface of the subject body, and the elapsed time.

Abstract: An LPP EUV light source includes a vacuum chamber 12 that is maintained in a vacuum environment; a gas jet device 14 that forms a hypersonic steady gas jet 1 of the target substance inside the vacuum chamber so as to be collected; and a laser device 16 that collects and radiates a laser beam 3 to the hypersonic steady gas jet, wherein plasma is produced by exciting the target substance at the light collecting point 2 of the laser beam and EUV light 4 is emitted therefrom.

Abstract: A plasma light source includes a pair of coaxial electrodes 10 facing each other, a radiation environment sustaining device 20 that supplies a plasma medium into the insides of the coaxial electrodes and holds the coaxial electrodes at a temperature and a pressure suitable for plasma generation, and a voltage application device 30 that applies a discharge voltage of an inverted polarity to each of the coaxial electrodes. Tubular discharge 4 is formed between the pair of coaxial electrodes and plasma 3 is confined in an axial direction of the coaxial electrodes.

Abstract: A method of non-destructive inspection of a subject body including one or more elements comprises irradiating the subject body with a neutron ray along an axis line passing through a reference point; synchronously detecting gamma rays from directions inclined at equal angles to the axis line at a plurality of measurement points disposed to have equivalent intervals radially from the axis line, respectively; measuring the detected gamma rays in a plurality of energy ranges; determining whether measured values in the respective energy ranges are beyond thresholds; determining energy ranges where all the measured values are beyond the thresholds; analyzing a type of an element from the determined energy ranges; and detecting a location of the analyzed type of the element in the subject body on the basis of the reference point, the respective measurement points, a relative position relative to a surface of the subject body, and the directions.

Abstract: A pair of coaxial electrodes 10 that face each other, a discharge-environment-maintaining device 20, and a voltage-applying device 30 are provided. Each coaxial electrode 10 includes a center electrode 12, a guide electrode 14 which surrounds the front end portion of the facing center electrode, and an insulation member 16 which insulates the center electrode and the guide electrode from each other. The insulation member 16 is formed of partially porous ceramics including an insulative dense portion 16a and a porous portion 16b. The insulative dense portion 16a includes a reservoir 18 which holds a plasma medium therein, and by the porous portion 16b, the inner surface of the reservoir 18 communicates with a gap between the center electrode 12 and the guide electrode 14 through the inside of the insulative dense portion 16a.

Abstract: A method for manufacturing ozone ice that is improved for its storage stability is provided. In the method, ice 11 including oxygen gas g2 as gas bubbles b is produced and the produced ice 11 is irradiated with ultraviolet radiation, then the oxygen gas g2 in the ice 11 is ozonized to manufacture ozone ice 1.

Abstract: A method for manufacturing ozone ice that is improved for its storage stability is provided. In the method, ice 11 including oxygen gas g2 as gas bubbles b is produced and the produced ice 11 is irradiated with ultraviolet radiation, then the oxygen gas g2 in the ice 11 is ozonized to manufacture ozone ice 1.

Abstract: A method of non-destructive inspection of a subject body including an element is comprised of irradiating the subject body with a neutron ray through a first measurement point and a second measurement point; measuring an elapsed time after a first time point when a resonant neutron specific to the element passes through the first measurement point and before a second time point when a prompt gamma ray made emitted by the resonant neutron from the subject body is detected at the second measurement point; and determining a location of the element in the subject body by the first measurement point, the second measurement point, a relative position toward a surface of the subject body, and the elapsed time.

Abstract: A method of non-destructive inspection of a subject body including one or more elements comprises irradiating the subject body with a neutron ray along an axis line passing through a reference point; synchronously detecting gamma rays from directions inclined at equal angles to the axis line at a plurality of measurement points disposed to have equivalent intervals radially from the axis line, respectively; measuring the detected gamma rays in a plurality of energy ranges; determining whether measured values in the respective energy ranges are beyond thresholds; determining energy ranges where all the measured values are beyond the thresholds; analyzing a type of an element from the determined energy ranges; and detecting a location of the analyzed type of the element in the subject body on the basis of the reference point, the respective measurement points, a relative position relative to a surface of the subject body, and the directions.

Abstract: A plasma light source system includes a plurality of plasma light source 10 that periodically emits plasma light 8 from respective predetermined light emitting points 1a and a light collecting device 40 that collects the plasma light emitted from the plurality of light emitting points of the plasma light sources to a single light collecting point 9.

Abstract: A pair of coaxial electrodes 10 that face each other, a discharge-environment-maintaining device 20, and a voltage-applying device 30 are provided. Each coaxial electrode 10 includes a center electrode 12, a guide electrode 14 which surrounds the front end portion of the facing center electrode, and an insulation member 16 which insulates the center electrode and the guide electrode from each other. The insulation member 16 is formed of partially porous ceramics including an insulative dense portion 16a and a porous portion 16b. The insulative dense portion 16a includes a reservoir 18 which holds a plasma medium therein, and by the porous portion 16b, the inner surface of the reservoir 18 communicates with a gap between the center electrode 12 and the guide electrode 14 through the inside of the insulative dense portion 16a.

Abstract: An LPP EUV light source includes a vacuum chamber 12 that is maintained in a vacuum environment; a gas jet device 14 that forms a hypersonic steady gas jet 1 of the target substance inside the vacuum chamber so as to be collected; and a laser device 16 that collects and radiates a laser beam 3 to the hypersonic steady gas jet, wherein plasma is produced by exciting the target substance at the light collecting point 2 of the laser beam and EUV light 4 is emitted therefrom.

Abstract: A plasma light source includes a pair of coaxial electrodes 10 facing each other, a radiation environment sustaining device 20 that supplies a plasma medium into the insides of the coaxial electrodes and holds the coaxial electrodes at a temperature and a pressure suitable for plasma generation, and a voltage application device 30 that applies a discharge voltage of an inverted polarity to each of the coaxial electrodes. Tubular discharge 4 is formed between the pair of coaxial electrodes and plasma 3 is confined in an axial direction of the coaxial electrodes.

Abstract: A method for manufacturing ozone ice that is improved for its storage stability is provided. In the method, ice 11 including oxygen gas g2 as gas bubbles b is produced and the produced ice 11 is irradiated with ultraviolet radiation, then the oxygen gas g2 in the ice 11 is ozonized to manufacture ozone ice 1.

Abstract: A hollow exciting current pathway in the form of a conductor is arranged outside of an ion deflection casing with a curved contour and having an inlet and an outlet. The conductor is composed of a widthwise spiral formation of conductors running through the inlet and outlet and along the curved contour with a result that a magnetic field which is uniform widthwise is formed in the ion deflection casing. An ion beam is introduced through between the conductors at the inlet into the hollow exciting current pathway. By the action of the magnetic field through the hollow exciting current pathway, the ion beam is bent depending upon mass of ions. The ion beam with desired mass is taken out through between the conductors at the outlet with a result that an ion beam greater in size can be ion mass separated uniformly.

Abstract: A hollow exciting current pathway in the form of conductor means is arranged outside of an ion deflection casing with a curved contour and having an inlet and an outlet. The conductor means is composed of a widthwise spiral formation of conductors running through the inlet and outlet and along the curved contour with a result that a magnetic field which is uniform widthwise is formed in the ion deflection casing. An ion beam is introduced through between the conductors at the inlet into the hollow exciting current pathway. By the action of the magnetic field through the hollow exciting current pathway, the ion beam is bent depending upon mass of ions; the ion beam with desired mass is taken out through between the conductors at the outlet with a result that the ion beam greater in size can be ion mass separated uniformly.