Patents by Inventor Hajime Samano

Hajime Samano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Teaching apparatus and method of teaching a wafer carrying apparatus a target position for placing and removing semiconductor wafers on and off a wafer boat using an imaging device and distance sensor
    Patent number: 7788197
    Abstract: A teaching apparatus and a teaching method that facilitates accurately setting a retainer at a target position, and minimizes troublesome steps in the manufacturing process, are to be provided. The teaching apparatus includes a first member held by the retainer of the carrying apparatus, a second member attached to the wafer boat (mounting rack) so as to oppose the first member held by the retainer when the retainer is set close to the target position, an output unit, and an arithmetic unit. The first member includes a distance sensor that generates a sensor signal representing a distance between the distance sensor and a surface of the second member opposing the first member. On the surface of the second member opposing the first member, a reference mark A is provided. The first member includes an imaging device that shoots an image including the reference mark A, and generates image data.
    Type: Grant
    Filed: November 3, 2006
    Date of Patent: August 31, 2010
    Assignee: NEC Electronics Corporation
    Inventors: Toshihiro Tooyama, Hajime Samano
  • Teaching apparatus and teaching method
    Publication number: 20070117228
    Abstract: A teaching apparatus and a teaching method that facilitates accurately setting a retainer at a target position, and minimizes troublesome steps in the manufacturing process, are to be provided. The teaching apparatus includes a first member held by the retainer of the carrying apparatus, a second member attached to the wafer boat (mounting rack) so as to oppose the first member held by the retainer when the retainer is set close to the target position, an output unit, and an arithmetic unit. The first member includes a distance sensor that generates a sensor signal representing a distance between the distance sensor and a surface of the second member opposing the first member. On the surface of the second member opposing the first member, a reference mark A is provided. The first member includes an imaging device that shoots an image including the reference mark A, and generates image data.
    Type: Application
    Filed: November 3, 2006
    Publication date: May 24, 2007
    Applicant: NEC ELECTRONICS CORPORATION
    Inventors: Toshihiro Tooyama, Hajime Samano