Abstract: A condition data acquirer acquires first data (condition data) of a plurality of items related to a test process of a plurality of semiconductor chips. A test result acquirer acquires second data (test result data) indicating test results of the plurality of semiconductor chips in the test process. A decision tree generator generates a decision tree with each item of the condition data as a feature amount and the test result data as a target value. An analysis result outputter outputs, as an item having a large influence on the test results, information of a feature amount having a relatively high importance in the decision tree.

Abstract: There is provided an analysis apparatus including: an acquisition unit configured to acquire a plurality of measured values obtained by measuring a device under measurement; a machine learning unit configured to use the plurality of measured values to learn, by machine learning, a model of a position-dependent component that depends on a measured position in the device under measurement; and an analysis unit configured to separate, from the plurality of measured values, the position-dependent component which is calculated by using the model learned by the machine learning unit. Further, there is provided an analysis method. Further, there is provided a recording medium having recorded thereon an analysis program.

Abstract: There is provided a maintenance apparatus including: an acquisition unit configured to acquire a plurality of test results, for each of a plurality of jigs, in a case where a plurality of devices under measurement, which are different from each other, are sequentially tested via the plurality of jigs; a calculation unit configured to calculate a variation in test results, for each jig, by using the plurality of test results; and a determination unit configured to determine maintenance timing of the jig based on the variation in the test results.

Abstract: There is provided a determination apparatus including: a result acquisition unit configured to acquire test results of tests on a plurality of items which are performed on a device under measurement; and a first determination unit configured to determine whether to retest a device under measurement that has failed the test, in which the first determination unit is configured to perform the determination based on reproducibility of the test results in a case where the tests have been performed on a plurality of devices under measurement multiple times in advance.

Abstract: There is provided a maintenance apparatus including: an acquisition unit configured to acquire a plurality of test results, for each of a plurality of jigs, in a case where a plurality of devices under measurement, which are different from each other, are sequentially tested via the plurality of jigs; a calculation unit configured to calculate a variation in test results, for each jig, by using the plurality of test results; and a determination unit configured to determine maintenance timing of the jig based on the variation in the test results.

Abstract: There is provided an analysis apparatus including: an acquisition unit configured to acquire a plurality of measured values obtained by measuring a device under measurement; a machine learning unit configured to use the plurality of measured values to learn, by machine learning, a model of a position-dependent component that depends on a measured position in the device under measurement; and an analysis unit configured to separate, from the plurality of measured values, the position-dependent component which is calculated by using the model learned by the machine learning unit. Further, there is provided an analysis method. Further, there is provided a recording medium having recorded thereon an analysis program.

Abstract: In order to analyze information obtained from a measurement system and to manage the measurement system, there is provided an analysis apparatus including: an acquisition unit configured to acquire a plurality of measured values obtained by a test apparatus measuring a device under measurement; an analysis unit configured to analyze the plurality of measured values to extract dispersion of a measured value; and a management unit configured to detect an error in the test apparatus based on the dispersion of the measured value. Further, in order to solve the above problem, there is provided an analysis method. Further, in order to solve the above problem, there is provided a recording medium having recorded thereon an analysis program.

Abstract: In order to analyze a plurality of measured values obtained by measuring a device under measurement and to effectively use the analyzed information, there is provided a recording medium having recorded thereon an analysis apparatus, the analysis apparatus including: an acquisition unit configured to acquire the plurality of measured values obtained by measuring the device under measurement via a jig; an analysis unit configured to analyze the plurality of measured values to calculate variation data which indicates a variation of a measured value in accordance with the number of times of contacts that the jig comes into contact with the device under measurement; and a management unit configured to manage a state of the jig based on the variation data.

Abstract: In order to efficiently test a plurality of types of devices under test, provided is a test apparatus that tests a device under test, comprising one or more test modules that each include a plurality of testing sections testing the device under test by exchanging signals with the device under test; and a plurality of control apparatuses that control operation of the testing sections. In each of the one or more test modules, the plurality of testing sections are each allocated to one of the plurality of control apparatuses, and each of the control apparatuses is capable of executing a test program managed by a different user, and controls operation of the testing sections allocated thereto.

Abstract: A test apparatus that tests a device under test, comprising a control apparatus sequentially executing a plurality of test programs and controlling testing of the device under test; and a test module controlled by the control apparatus to test the device under test by communicating with the device under test and to transmit a test result of each test program to the control apparatus. The test module includes memories that store the test results of the test programs, and starts a subsequent test such that at least a portion of a result processing time period of a current test, from when a test result stored in a first memory begins being transmitted to the control apparatus to when processing of the test result by the control apparatus ends, overlaps with at least a portion of a test execution period in which the subsequent test is executed using a second memory.

Abstract: Provided is a test apparatus that tests a device under test, comprising a test module that communicates with the device under test to test the device under test; and a control apparatus that executes a plurality of test programs, causes the test module to perform tests corresponding respectively to the test programs, receives test results from the test module, and performs predetermined result processes on the test results. The control apparatus stores an execution order of the test programs, and executes at least a portion of the result processes in an order indicated by the stored execution order.

Abstract: A test apparatus that tests a device under test, comprising a control apparatus sequentially executing a plurality of test programs and controlling testing of the device under test; and a test module controlled by the control apparatus to test the device under test by communicating with the device under test and to transmit a test result of each test program to the control apparatus. The test module includes memories that store the test results of the test programs, and starts a subsequent test such that at least a portion of a result processing time period of a current test, from when a test result stored in a first memory begins being transmitted to the control apparatus to when processing of the test result by the control apparatus ends, overlaps with at least a portion of a test execution period in which the subsequent test is executed using a second memory.

Abstract: In order to efficiently test a plurality of types of devices under test, provided is a test apparatus that tests a device under test, comprising one or more test modules that each include a plurality of testing sections testing the device under test by exchanging signals with the device under test; and a plurality of control apparatuses that control operation of the testing sections. In each of the one or more test modules, the plurality of testing sections are each allocated to one of the plurality of control apparatuses, and each of the control apparatuses is capable of executing a test program managed by a different user, and controls operation of the testing sections allocated thereto.

Abstract: Provided is a test apparatus that tests a device under test, comprising a test module that communicates with the device under test to test the device under test; and a control apparatus that executes a plurality of test programs, causes the test module to perform tests corresponding respectively to the test programs, receives test results from the test module, and performs predetermined result processes on the test results. The control apparatus stores an execution order of the test programs, and executes at least a portion of the result processes in an order indicated by the stored execution order.

Abstract: In order to shorten testing time, provided is a test apparatus that tests a device under test, comprising one or more test modules that each include a plurality of testing sections testing the device under test by exchanging signals with the device under test; and a control apparatus that controls operation of the testing sections. The control apparatus executes in parallel a plurality of test programs for testing the device under test, to control in parallel the operation of the testing sections assigned respectively to the test programs, and the testing sections test the device under test by exchanging signals in parallel with the device under test.

Abstract: There is provided a test apparatus for testing a device under test, including an obtaining section that obtains a packet sequence communicated between the test apparatus and the device under test, from a simulation environment for simulating an operation of the device under test, a packet communication program generating section that generates from the packet sequence a packet communication program for a test, where the packet communication program is to be executed by the test apparatus to communicate packets included in the packet sequence between the test apparatus and the device under test, and a testing section that executes the packet communication program to test the device under test by communicating the packets between the test apparatus and the device under test.

Abstract: A simulation system includes a Response database for storing Response Data in which an output result of a device-under-test (DUT) model for a predetermined test item is set, and a framework for causing the test plan program to operate. The framework determines an output result of a DUT or a DUT model for a predetermined test item, which is executed based on the test plan program, based on the Response Data stored in the Response database. That enables a test flow to be verified in an offline simulation environment of the test equipment without loading a pattern program.

Abstract: The simulation method includes a step of measuring a predetermined characteristic from a real device by using test equipment that supplies a test signal to a device-under-test (DUT); a step of saving Response Data generated from measurements obtained by measuring in a file; and a step of verifying activities of a test plan program in a simulation system that simulates the test equipment by using the Response Data saved in the file.