Patents by Inventor Hakan Altan

Hakan Altan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Non-linear terahertz spectroscopy for defect density identification in high k dielectric films
    Patent number: 7459687
    Abstract: Methods to infer the density of defects in high ? dielectric films in a non-contact, non-invasive and non-destructive manner. THz radiation is employed to measure the change in electrical conductivity of the films before and after illumination with visible light, where the visible light photoionizes the defects thereby changing the electrical conductivity and changing the transmission (or reflection) of THz radiation from the films. The disclosed techniques can be employed to make measurements as soon as wafers are fabricated. The technology is applicable to wafers of any size.
    Type: Grant
    Filed: April 6, 2007
    Date of Patent: December 2, 2008
    Assignee: New Jersey Institute of Technology
    Inventors: John Francis Federici, Haim Grebel, Hakan Altan
  • Non-Linear Terahertz Spectroscopy for Defect Density Identification in High K Dielectric Films
    Publication number: 20070235650
    Abstract: Methods to infer the density of defects in high ? dielectric films in a non-contact, non-invasive and non-destructive manner. THz radiation is employed to measure the change in electrical conductivity of the films before and after illumination with visible light, where the visible light photoionizes the defects thereby changing the electrical conductivity and changing the transmission (or reflection) of THz radiation from the films. The disclosed techniques can be employed to make measurements as soon as wafers are fabricated. The technology is applicable to wafers of any size.
    Type: Application
    Filed: April 6, 2007
    Publication date: October 11, 2007
    Inventors: John Federici, Haim Grebel, Hakan Altan