Patents by Inventor Hakeem S. B. Akinmade-Yusuff

Hakeem S. B. Akinmade-Yusuff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Damascene wiring fabrication methods incorporating dielectric cap etch process with hard mask retention
    Patent number: 7470616
    Abstract: Methods for fabricating metal wiring layers of a semiconductor device are provided where damascene interconnect structures are formed in a BEOL process that incorporates a dielectric cap-open-first process to achieve hard mask retention and to control the gouging of a buffer oxide layer to prevent exposure of underlying features protected by the buffer oxide layer.
    Type: Grant
    Filed: May 15, 2008
    Date of Patent: December 30, 2008
    Assignee: International Business Machines Corporation
    Inventors: Hakeem S. B. Akinmade-Yusuff, Kaushik A. Kumar, Anthony D. Lisi