Abstract: Provided is a substrate processing apparatus including: a chamber, a stage in the chamber and configured to support a substrate, a first precursor supplier configured to provide a metal precursor into the chamber, a second precursor supplier configured to provide a reaction gas into the chamber, a first power supplier configured to apply first power having a first frequency into the chamber, a second power supplier configured to apply second power having a second frequency into the chamber, and a controller configured to control the first power supplier to apply the first power and the first precursor supplier to provide the metal precursor into the chamber, and the second power supplier to apply the second power and the second precursor supplier to provide the reaction gas into the chamber, in which the first frequency and the second frequency may be different.

Abstract: A new approach is proposed to support hardware-based memory region protection for an electronic device. One or more sources/requesting access to a memory/storage that is local to or associated with the electronic device are categorized into at least two types—a set of trusted sources and a set of untrusted sources. Accordingly, a memory manager is configured to partition the memory into a plurality of regions including at least a secure region that is accessible only by a trusted source and a non-secure region that is accessible by an untrusted source. Any access attempt to the secure region by one of the untrusted sources will be blocked. During operation, the memory manager is configured to dynamically adjust the demarcation and/or size of the secure region and the non-secure region of the memory via remapping of the memory based on current access need to data maintained in the memory.

Abstract: A new approach is proposed to support hardware-based memory region protection for an electronic device. One or more sources/requesting access to a memory/storage that is local to or associated with the electronic device are categorized into at least two types—a set of trusted sources and a set of untrusted sources. Accordingly, a memory manager is configured to partition the memory into a plurality of regions including at least a secure region that is accessible only by a trusted source and a non-secure region that is accessible by an untrusted source. Any access attempt to the secure region by one of the untrusted sources will be blocked. During operation, the memory manager is configured to dynamically adjust the demarcation and/or size of the secure region and the non-secure region of the memory via remapping of the memory based on current access need to data maintained in the memory.