Abstract: Methods for preparing metal structures on substrates by providing at least two substrates on which different parts of the metal structure are formed, which are bonded together to form the metal structure by thermocompression bonding, thermosonic bonding or transient liquid phase bonding such that a hermetic seal is provided and an optional hermetically sealed cavity forms in the structure, and releasing at least one of the substrates from the thereto bonded metal structure by removing a seed layer or sacrificial layer by an etching or reverse plating technique.

Abstract: A system for cooling a power component includes a first metal layer. A cooling layer having a first surface is in contact with a surface of the first metal layer. A second metal layer is included having a surface in contact with a second surface of the cooling layer opposite the first metal layer. The cooling layer is of a material different from that of the first metal layer and that of the second metal layer. A plurality of cooling features are embedded in the material of the cooling layer. The cooling channels are spaced apart from both the first metal layer and the second metal layer by the material of the cooling layer. An electrically conductive path connects the first metal plate to the second metal plate.

Abstract: A system for cooling a power component includes a first metal layer. A cooling layer having a first surface is in contact with a surface of the first metal layer. A second metal layer is included having a surface in contact with a second surface of the cooling layer opposite the first metal layer. The cooling layer is of a material different from that of the first metal layer and that of the second metal layer. A plurality of cooling features are embedded in the material of the cooling layer. The cooling channels are spaced apart from both the first metal layer and the second metal layer by the material of the cooling layer. An electrically conductive path connects the first metal plate to the second metal plate.