Patents by Inventor Hamad S. ALOTAIBI

Hamad S. ALOTAIBI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Susceptor
    Patent number: 11339478
    Abstract: A susceptor device for a chemical vapor deposition (CVD) reactor including metal organic CVD (MOCVD) used in the semiconductor industry. The susceptor device particularly is used with induction heating and includes a horizontal plate adapted for holding one or more wafers and a vertical rod around which the induction heating coils are disposed. A screw system and an insulator can further be used. This design helps prevent undesired levitation and allows for the gas injectors of the reactors to be placed closer to the wafer for deposition during high-temperature deposition processes at susceptor surface temperatures of about 1500° C. or higher.
    Type: Grant
    Filed: September 18, 2017
    Date of Patent: May 24, 2022
    Assignees: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY, KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
    Inventors: Xiaohang Li, Kuang-Hui Li, Hamad S. Alotaibi
  • SUSCEPTOR
    Publication number: 20190186006
    Abstract: A susceptor device for a chemical vapor deposition (CVD) reactor including metal organic CVD (MOCVD) used in the semiconductor industry. The susceptor device particularly is used with induction heating and includes a horizontal plate adapted for holding one or more wafers and a vertical rod around which the induction heating coils are disposed. A screw system and an insulator can further be used. This design helps prevent undesired levitation and allows for the gas injectors of the reactors to be placed closer to the wafer for deposition during high-temperature deposition processes at susceptor surface temperatures of about 1500° C. or higher.
    Type: Application
    Filed: September 18, 2017
    Publication date: June 20, 2019
    Inventors: Xiaohang LI, Kuang-Hui LI, Hamad S. ALOTAIBI