Patents by Inventor Hamada Wahba

Hamada Wahba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optics for In-Situ Scanning Electron Microscope Repair
    Publication number: 20250087450
    Abstract: An apparatus is loaded into a scanning electron microscope (SEM) through a load lock of the SEM and onto a stage of the SEM. The apparatus includes a substrate and also includes optics, mechanically coupled to the substrate, to direct light upward away from the substrate. With the apparatus on the stage of the SEM, the optics are used to direct the light upward through an aperture of the SEM onto an electron detector in the SEM.
    Type: Application
    Filed: December 15, 2023
    Publication date: March 13, 2025
    Inventors: Tomas Plettner, Lesther Moreira Osorio, Kenneth Leedle, Hamada Wahba, Joseph Hijazi, Earl Jensen, Rush Ogden, Oersan Yueksek, Maseeh Mukhtar
  • System for electron beam detection
    Patent number: 9778186
    Abstract: An electron beam detection apparatus includes a first aperture element including a first set of apertures. The apparatus includes a second aperture element including a second set of apertures. The second set of apertures is arranged in a pattern corresponding with the pattern of the first plurality of apertures. The detection apparatus includes an electron-photon conversion element configured to receive electrons of the electron beam transmitted through the first and second aperture elements. The electron-photon conversion element is configured to generate photons in response to the received electrons. The detection apparatus includes an optical assembly including one or more optical elements. The detection apparatus includes a detector assembly. The optical elements of the optical assembly are configured to direct the generated photons from the electron-photon conversion system to the detector assembly.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: October 3, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Shinichi Kojima, Hamada Wahba, Michael R. Gluszczak, Joseph A. DiRegolo
  • System for Electron Beam Detection
    Publication number: 20160011110
    Abstract: An electron beam detection apparatus includes a first aperture element including a first set of apertures. The apparatus includes a second aperture element including a second set of apertures. The second set of apertures is arranged in a pattern corresponding with the pattern of the first plurality of apertures. The detection apparatus includes an electron-photon conversion element configured to receive electrons of the electron beam transmitted through the first and second aperture elements. The electron-photon conversion element is configured to generate photons in response to the received electrons. The detection apparatus includes an optical assembly including one or more optical elements. The detection apparatus includes a detector assembly. The optical elements of the optical assembly are configured to direct the generated photons from the electron-photon conversion system to the detector assembly.
    Type: Application
    Filed: April 14, 2015
    Publication date: January 14, 2016
    Inventors: Shinichi Kojima, Hamada Wahba, Michael R. Gluszczak, Joseph A. DiRegolo