Abstract: Aspects of the disclosure relate to piezoelectric microelectromechanical systems (MEMS) devices. A piezoelectric MEMS device may include a transducer body including an acoustic cavity extending from a bottom surface to a top surface; and a substrate including a plurality of layers and coupled to the bottom surface of the transducer body, the substrate including a hole formed by the plurality of layers, and wherein the plurality of layers comprises a solder mask, a top metal layer, and a plurality of tapered layers below the top metal layer having incrementally varying aperture sizes relative to at least one adjacent layer.

Abstract: Aspects of the disclosure relate to piezoelectric microelectromechanical systems (MEMS) devices. A piezoelectric MEMS device may include a transducer body including an acoustic cavity extending from a bottom surface to a top surface; a piezoelectric cantilever disposed over the top surface and including a lever region and a sensing region; and an anchor reinforcement member disposed over the piezoelectric cantilever and the transducer body.

Abstract: Aspects of the disclosure relate to piezoelectric microelectromechanical systems (MEMS) devices. A piezoelectric MEMS device may include a transducer body including an acoustic cavity extending from a bottom surface to a top surface and a piezoelectric cantilever disposed over the top surface and comprising a sensing region and a lever region including an embossed structure. The embossed structure comprises a non-planar portion disposed in the lever region and the non-planar portion is offset by 1.5 microns with respect to edges of the lever region. In some aspects, the piezoelectric cantilever is part of a plurality of piezoelectric cantilevers disposed over the top surface of the transducer body.

Abstract: Aspects of the disclosure relate to microelectromechanical systems (MEMS) and A device implementation may include a substrate having a top surface, a bottom surface opposite the top surface, a bottom surface aperture, and a top surface aperture, an acoustic cavity comprising a volume extending from the bottom surface aperture to the top surface aperture, an electroacoustic structure formed at the top surface of the substrate, where the electroacoustic structure comprises an acoustic layer, and where the acoustic layer has a functional range of motion, and a mechanical overstress protection structure formed over the acoustic layer and positioned to contact the acoustic layer when the acoustic layer approaches or exceeds an end of the functional range of motion deflecting away from the substrate.

Abstract: A method of reducing signals associated with one or more classes of unwanted noise is disclosed which includes choosing one or more classes as noise to be cancelled while allowing the remainder of classes amongst a plurality of classes to pass through, dividing an incoming time-varying signal into a plurality of snippets having a single or a plurality of durations, transforming each snippet into an associated frequency spectrum, thus generating a plurality of spectra, for each spectrum of the plurality of spectra, identifying presence of the one or more classes chosen as noise, for each identified class of noise, multiplying a 180° phase-shifted version of a frequency signal associated with the identified class of noise by a frequency spectrum of the incoming signal, thereby generating an associated frequency-domain noise-cancelled spectrum, inverse transforming the frequency-domain noise-cancelled spectrum into a time-varying noise-cancelled signal, and outputting the time-varying noise-cancelled signal.

Abstract: A method of reducing signals associated with one or more classes of unwanted noise is disclosed which includes choosing one or more classes as noise to be cancelled while allowing the remainder of classes amongst a plurality of classes to pass through, dividing an incoming time-varying signal into a plurality of snippets having a single or a plurality of durations, transforming each snippet into an associated frequency spectrum, thus generating a plurality of spectra, for each spectrum of the plurality of spectra, identifying presence of the one or more classes chosen as noise, for each identified class of noise, multiplying a 180° phase-shifted version of a frequency signal associated with the identified class of noise by a frequency spectrum of the incoming signal, thereby generating an associated frequency-domain noise-cancelled spectrum, inverse transforming the frequency-domain noise-cancelled spectrum into a time-varying noise-cancelled signal, and outputting the time-varying noise-cancelled signal.

Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.

Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.

Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.

Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.