Patents by Inventor Hamphrey J. Maris

Hamphrey J. Maris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical method for the characterization of laterally-patterned samples in integrated circuits
    Publication number: 20090213375
    Abstract: Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change: in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
    Type: Application
    Filed: March 13, 2009
    Publication date: August 27, 2009
    Inventor: Hamphrey J. Maris