Abstract: A gas curtain device includes a main body having at least one gas inlet and a gas permeable assembly disposed inside the main body. The gas permeable assembly includes a baffle plate provided with a plurality of through holes and a gas permeable plate made of a porous material containing plenty of pores. A gas enters the main body via the at least one gas inlet, passes through the through holes of the baffle plate, and is discharged from the gas permeable plate.

Abstract: A carrier plate applied for a load port is provided, which includes a first guide slot is provided with a first switch to drive a first nozzle to move up and down to switch the position, a second guide slot is provided with a second switch to drive a second nozzle to move up and down to switch the position, a third guide slot is provided with a third switch to drive a third nozzle to move obliquely to switch the position, and a fourth guide slot is provided with a fourth nozzle to move obliquely to switch the position, thereby, the first nozzle, the second nozzle, the third nozzle and the fourth nozzle move to the positions corresponding to the air holes on each of the bottoms of the wafer transfer cassettes to inflate or exhaust the wafer transfer cassette.

Abstract: A purge controlling system includes a purge module and a control module. The purge module is arranged in the load port and is electrically connected with the control module. The purge module includes an air curtain unit, a flow control unit and a sensing unit. The control module controls the purge module to provide adequate gas flow of purge gas into the air curtain unit and form a gas curtain according to the displacement value of the door assembly.