Abstract: An extreme ultraviolet (EUV) photolithography system cleans debris from an EUV reticle. The system includes a cleaning electrode configured to be positioned adjacent the EUV reticle. The system includes a voltage source that helps draw debris from the EUV reticle toward the cleaning electrode by applying a voltage of alternating polarity to the cleaning electrode.

Abstract: The present disclosure relates to a method for determining a vehicle pose, predicting a pose (xk, yk, ?k) of vehicle on a map based on sensor data acquired by a vehicle localization system, transforming a set of map road references of a segment of a digital map from a global coordinate system to an image-frame coordinate system of a vehicle-mounted camera based on map data and predicted pose of the vehicle. The transformed set of map road references form a set of polylines in image-frame coordinate system. Identifying a set of corresponding image road reference features in an image acquired by vehicle mounted camera, where each identified road references feature defines a set of measurement coordinates (xi, yi) in image-frame. Projecting each of identified set of image road reference features onto formed set of polylines in order to obtain a set of projection points.

Abstract: The present invention relates to a coffee powder for providing a coffee beverage with crema. Further aspects of the invention are the use of a coffee powder to prepare a beverage: a beverage powder mixture and a method for the manufacture of a freeze-dried coffee powder.

Abstract: A magnetic tunnel junction (MTJ) memory cell and a metallic etch mask portion are formed over a substrate. At least one dielectric etch stop layer is deposited over the metallic etch mask portion, and a via-level dielectric layer is deposited over the at least one dielectric etch stop layer. A via cavity may be etched through the via-level dielectric layer, and a top surface of the at least one dielectric etch stop layer is physically exposed. The via cavity may be vertically extended by removing portions of the at least one dielectric etch stop layer and the metallic etch mask portion. A contact via structure is formed directly on a top surface of the top electrode in the via cavity to provide a low-resistance contact to the top electrode.

Abstract: An architected transitional metal dichalcogenides, TMD, foam includes plural layers of TMD arranged on top of each other along a given first direction Z, each layer including plural cells, each cell being defined by one or more struts made of the TMD; plural channels extending along a given second direction M, which makes an angle ? with the first given direction Z; and plural pores formed on sides of the plural channels.

Abstract: An optical device is provided. The optical device includes a substrate that has a top surface and a bottom surface. The optical device also includes a cover layer disposed on the substrate, and the cover layer has a top surface and a bottom surface. The top surface of the cover layer faces the bottom surface of the substrate. The optical device further includes a first meta structure disposed on the bottom surface of the substrate and a second meta structure disposed on the top surface of the cover layer. Moreover, the optical device includes a detector disposed on the bottom surface of the cover layer.

Abstract: An image sensor includes a group of sensor units, a color filter layer disposed within the group of sensor units, and a dielectric structure and a metasurface disposed corresponding to the color filter layer. The metasurface includes a plurality of peripheral nanoposts located at corners of the group of sensor units from top view, respectively, a central nanopost enclosed by the plurality of peripheral nanoposts, and a filling material laterally surrounding the plurality of peripheral nanoposts and the central nanopost. The central nanopost is offset from a center point of the group of sensor units by a distance from top view.

Abstract: A method forming a grating device includes: providing a substrate; entering the substrate into a process chamber; and depositing a grating material on the substrate to form a grating material layer on the substrate. A refractive index of the grating material gradually changes during depositing the grating material in the process chamber. The grating material layer includes a varying refractive index.

Abstract: A spectrometer includes a plurality of photodetectors, an anti-reflection layer, a grating layer, a distant layer, and a collimator. The anti-reflection layer is disposed on the plurality of photodetectors. The grating layer is disposed above the anti-reflection layer and includes a plurality of grating structures to spread a light into a spectrum to the plurality of photodetectors through the distant layer. The distant layer continuously extends from the grating layer to the anti-reflection layer, the distant layer has a thickness in a range from 400 ?m to 2000 ?m, and a refractive index of the grating layer is greater than a refractive index of the distant layer. The collimator is disposed above the grating layer, in which the collimator is configured to confine an incident angle of the light from a first micro-lens.

Abstract: A waveguide structure is provided. The waveguide structure includes waveguide combiners stacked one upon the other. Each waveguide combiner includes a waveguide plate and an input coupler disposed on the waveguide plate. The input coupler of at least one waveguide combiner includes first grating pillars, and each first grating pillar has a gradually changing refractive index.

Abstract: The optical system includes a projector, a deflector, a polarizer, a first grating coupler structure, and a second grating coupler structure. The projector emits three beams having different wavelengths. The deflector is disposed below the projector and is configured to change incident angles of the three beams and to focus the three beams at the same region of the first grating coupler structure. The first grating coupler structure is below the deflector and is configured to couple the three beams into a light-guide lens such that the three beams travel the same optical path within the light-guide lens. The light-guide lens is connected to the first grating coupler structure and is configured to transmit the three beams. The polarizer is disposed between the projector and the deflector and is configured to filter out transverse electric (TE) modes or transverse magnetic (TM) modes of the three beams.

Abstract: Described herein are an immobilized enzyme, and a preparation method therefor and a use thereof. The immobilized enzyme includes activated PEI and an enzyme covalently bonded to the activated PEI, where the enzyme is selected from any one of a transaminase, a ketoreductase, a monooxygenase, an ammonia lyase, an ene-reductase, an imine reductase, an amino acid dehydrogenase and a nitrilase.

Abstract: The invention discloses a care bed including a bed frame and a wheelchair. A head panel, a tail panel, a foldable first lateral connecting portion and a second lateral connecting portion of the bed frame constitute an accommodating space of the bed frame. The bed frame has a notch formed at the folded first lateral connecting portion. The wheelchair is moved by the carriage base into the accommodating space through the notch. The backrest, the first armrest, the second armrest, the leg-rest and the footrest of the wheelchair are regulated into a co-plane with the seat to constitute a mattress. The mattress fits the accommodating space of the bed frame.

Abstract: The invention discloses a care bed including a bed frame and a wheelchair. A head panel, a tail panel, a foldable first lateral connecting portion and a second lateral connecting portion of the bed frame constitute an accommodating space of the bed frame. The bed frame has a notch formed at the folded first lateral connecting portion. The wheelchair is moved by the carriage base into the accommodating space through the notch. The backrest, the first armrest, the second armrest, the leg-rest and the footrest of the wheelchair are regulated into a co-plane with the seat to constitute a mattress. The mattress fits the accommodating space of the bed frame.