Patents by Inventor Han HARTGERS

Han HARTGERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vibration isolation system with one or more magnetic actuators
    Patent number: 11953073
    Abstract: An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.
    Type: Grant
    Filed: March 18, 2020
    Date of Patent: April 9, 2024
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Han Hartgers, Arndt Evers, Simon Schadt
  • VIBRATION ISOLATION SYSTEM WITH ONE OR MORE MAGNETIC ACTUATORS
    Publication number: 20220186808
    Abstract: An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.
    Type: Application
    Filed: March 18, 2020
    Publication date: June 16, 2022
    Inventors: Han HARTGERS, Arndt EVERS, Simon SCHADT
  • STATIONARY VIBRATION ISOLATION SYSTEM AND CONTROL METHOD THEREOF
    Publication number: 20200325958
    Abstract: A stationary vibration isolation system including a plurality of isolators by way of which a load which is mounted in a vibration isolated manner is supported. The vibration isolation system includes a plurality of actuators by way of which vibrations of the load are actively countered. Each isolator respectively has its own separate control unit with a digital-analog converter for controlling the actuators.
    Type: Application
    Filed: April 13, 2020
    Publication date: October 15, 2020
    Applicant: Integrated Dynamics Engineering GmbH
    Inventors: Carsten Conrady, Han Hartgers, Björn Dollak
  • Pneumatic actuator and method for operating an active vibration isolation system
    Patent number: 10480609
    Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: November 19, 2019
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Frank Hofmann, Han Hartgers, Till Scharf
  • SERVICE CART
    Publication number: 20180155126
    Abstract: The invention relates to a maintenance apparatus for a clean room or for systems in the clean room comprising a system component which can be moved horizontally and vertically. The system component is suspended on magnetic rails.
    Type: Application
    Filed: March 9, 2016
    Publication date: June 7, 2018
    Applicant: Integrated Dynamics Engineering GmbH
    Inventors: Ingo WEISKE, Arndt EVERS, Han HARTGERS, Andreas BIRKNER, Guido VAN LOON
  • PNEUMATIC ACTUATOR AND METHOD FOR OPERATING AN ACTIVE VIBRATION ISOLATION SYSTEM
    Publication number: 20170370442
    Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 28, 2017
    Inventors: Arndt EVERS, Frank HOFMANN, Han HARTGERS, Till SCHARF