Patents by Inventor Han-June YOON

Han-June YOON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of measuring critical dimension of pattern and apparatus for performing the same
    Patent number: 8988521
    Abstract: In a method of measuring a critical dimension of a pattern, a pattern image is obtained from an object pattern. A design pattern of the object pattern and the pattern image are matched to determine a detection region on the pattern image. An optimum turning point of the pattern contour is determined in the detection region and a ROI (region of interest) is set within a predetermined range from the optimum turning point. A critical dimension of the pattern is measured in the ROI.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: March 24, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Han-June Yoon, Hyung-Joo Lee, Won-Joo Park
  • METHOD OF MEASURING CRITICAL DIMENSION OF PATTERN AND APPARATUS FOR PERFORMING THE SAME
    Publication number: 20120105617
    Abstract: In a method of measuring a critical dimension of a pattern, a pattern image is obtained from an object pattern. A design pattern of the object pattern and the pattern image are matched to determine a detection region on the pattern image. An optimum turning point of the pattern contour is determined in the detection region and a ROI (region of interest) is set within a predetermined range from the optimum turning point. A critical dimension of the pattern is measured in the ROI.
    Type: Application
    Filed: September 20, 2011
    Publication date: May 3, 2012
    Inventors: Han-June YOON, Hyung-Joo Lee, Won-Joo Park