Patents by Inventor Han-Min Tsai

Han-Min Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230387856
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 30, 2023
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Patent number: 11791773
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Patent number: 11646312
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: May 9, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Patent number: 11532614
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20210375862
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Application
    Filed: August 16, 2021
    Publication date: December 2, 2021
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Patent number: 11181778
    Abstract: The present invention provides a display device, including: a first chromatic light source configured to generate first chromatic light, a dichroic reflection layer disposed on a light emergent side of the first chromatic light source and allowing the first chromatic light to pass through, and a quantum dot layer. The dichroic reflection layer has a first surface facing away from the first chromatic light source, and the first surface has a plurality of recessed portions. The quantum dot layer includes a plurality of quantum dot blocks, and the quantum dot blocks are disposed corresponding to the recessed portions.
    Type: Grant
    Filed: January 22, 2019
    Date of Patent: November 23, 2021
    Assignee: AU OPTRONICS CORPORATION
    Inventors: Ting-Yi Kuo, Han-Min Tsai, Pi-Fei Tsai, Hung-Chih Luan, Sheng-Hung Wang, He-Yuan Yang
  • Publication number: 20210344303
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Application
    Filed: July 12, 2021
    Publication date: November 4, 2021
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Patent number: 11094694
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Grant
    Filed: December 31, 2019
    Date of Patent: August 17, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Publication number: 20210242197
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Application
    Filed: April 22, 2021
    Publication date: August 5, 2021
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 11063559
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: July 13, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Patent number: 10991687
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: April 27, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20200135730
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Application
    Filed: December 31, 2019
    Publication date: April 30, 2020
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Publication number: 20200126975
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Application
    Filed: December 23, 2019
    Publication date: April 23, 2020
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 10529711
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Grant
    Filed: August 23, 2017
    Date of Patent: January 7, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Patent number: 10522535
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: December 31, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 10522534
    Abstract: Disclosed is a FinFET varactor with low threshold voltage and methods of making the same. A disclosed method includes receiving a semiconductor layer over a substrate and having channel, source, and drain regions. The method includes forming a well in the semiconductor layer to have a first dopant, and implanting a second dopant into the well. The first and second dopants are of opposite doping types. A first portion of the well has a higher concentration of the second dopant than the first dopant. A second portion of the well under the first portion has a higher concentration of the first dopant than the second dopant. The method further includes forming a gate stack over the channel region, and forming source and drain features in the source and drain regions. The first portion of the well electrically connects the source and drain features.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: December 31, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20190250464
    Abstract: The present invention provides a display device, including: a first chromatic light source configured to generate first chromatic light, a dichroic reflection layer disposed on a light emergent side of the first chromatic light source and allowing the first chromatic light to pass through, and a quantum dot layer. The dichroic reflection layer has a first surface facing away from the first chromatic light source, and the first surface has a plurality of recessed portions. The quantum dot layer includes a plurality of quantum dot blocks, and the quantum dot blocks are disposed corresponding to the recessed portions.
    Type: Application
    Filed: January 22, 2019
    Publication date: August 15, 2019
    Inventors: Ting-Yi Kuo, Han-Min Tsai, Pi-Fei Tsai, Hung-Chih Luan, Sheng-Hung Wang, He-Yuan Yang
  • Publication number: 20180337173
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Application
    Filed: July 31, 2018
    Publication date: November 22, 2018
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20170352660
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Application
    Filed: August 23, 2017
    Publication date: December 7, 2017
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Publication number: 20170317073
    Abstract: Disclosed is a FinFET varactor with low threshold voltage and methods of making the same. A disclosed method includes receiving a semiconductor layer over a substrate and having channel, source, and drain regions. The method includes forming a well in the semiconductor layer to have a first dopant, and implanting a second dopant into the well. The first and second dopants are of opposite doping types. A first portion of the well has a higher concentration of the second dopant than the first dopant. A second portion of the well under the first portion has a higher concentration of the first dopant than the second dopant. The method further includes forming a gate stack over the channel region, and forming source and drain features in the source and drain regions. The first portion of the well electrically connects the source and drain features.
    Type: Application
    Filed: December 29, 2016
    Publication date: November 2, 2017
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang