Patents by Inventor Han-Pin Chung

Han-Pin Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240110030
    Abstract: A styrene-modified polyethylene-based expandable resin particle is provided, which comprise a polyethylene resin and a polystyrene resin, wherein a content of the polyethylene resin ranges from 5 wt % to 30 wt % and a content of the polystyrene resin ranges from 70 wt % to 95 wt % based on 100 wt % of the polyethylene resin and the polystyrene resin, wherein the expandable resin particle comprises a xylene insoluble matter and an acetone insoluble matter, and a ratio of a content of the xylene insoluble matter to a content of the acetone insoluble matter ranges from 0.01 to 5. In addition, an expanded resin particle and a foamed resin molded article prepared by the aforesaid expandable resin particle are also provided. Furthermore, a method for manufacturing the aforesaid expandable resin particle is also provided.
    Type: Application
    Filed: September 28, 2023
    Publication date: April 4, 2024
    Inventors: Han-Liou YI, Yao-Hsien CHUNG, Cheng-Ting HSIEH, Yu-Pin LIN, Keng-Wei HSU
  • Publication number: 20240047276
    Abstract: A semiconductor structure and a method for forming the same are provided. The method includes forming a first protruding structure and a second protruding structure over a substrate, and forming a first insulation material layer on the first protruding structure and the second protruding structure. The method includes performing a pre-treatment process on the first insulation material layer to form a first treated insulation material layer, and forming a second insulation material layer on the first treated insulation material layer. The method includes performing a first insulation material conversion process on the first treated insulation material layer and the second insulation material layer. The first protruding structure and the second protruding structure are bent toward opposite directions during the first insulation material conversion process.
    Type: Application
    Filed: October 13, 2023
    Publication date: February 8, 2024
    Inventors: Han-Pin CHUNG, Chih-Tang PENG, Tien-I BAO
  • Patent number: 11823960
    Abstract: A semiconductor structure and a method for forming the same are provided. The method includes forming a first protruding structure, a second protruding structure, and a third protruding structure over a substrate. The method also includes performing a depositing process to form a first insulation material layer between the first protruding structure and the second protruding structure. The method further includes performing a first insulation material conversion process onto the first insulation material layer to bend the first protruding structure and the second protruding structure toward opposite directions.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: November 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Han-Pin Chung, Chih-Tang Peng, Tien-I Bao
  • Publication number: 20210233764
    Abstract: A semiconductor device and a method of forming a semiconductor device include forming a dielectric material, performing a wet oxidation treatment on the dielectric material, and performing a dry anneal on the dielectric material. The dielectric material may be a flowable material. The wet oxidation treatment may include an acid and oxidizer mixture.
    Type: Application
    Filed: July 15, 2020
    Publication date: July 29, 2021
    Inventors: Han-Pin Chung, Chi-Kang Liu
  • Publication number: 20210043523
    Abstract: A semiconductor structure and a method for forming the same are provided. The method includes forming a first protruding structure, a second protruding structure, and a third protruding structure over a substrate. The method also includes performing a depositing process to form a first insulation material layer between the first protruding structure and the second protruding structure. The method further includes performing a first insulation material conversion process onto the first insulation material layer to bend the first protruding structure and the second protruding structure toward opposite directions.
    Type: Application
    Filed: October 26, 2020
    Publication date: February 11, 2021
    Inventors: Han-Pin CHUNG, Chih-Tang PENG, Tien-I BAO
  • Patent number: 10872961
    Abstract: A method of fabricating a semiconductor device includes forming a plurality of semiconductor fins on a substrate. A liner layer is deposited on the semiconductor fins and on the substrate conformally. The semiconductor fins are patterned to form a plurality of active regions on the substrate after the liner layer is deposited.
    Type: Grant
    Filed: August 13, 2018
    Date of Patent: December 22, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Han-Pin Chung
  • Patent number: 10840154
    Abstract: A semiconductor structure and a method for forming the same are provided. The method includes forming a first insulation material layer in a portion of a trench between a first protruding structure and a second protruding structure over a substrate and performing a pre-treatment process on the first insulation material layer. The method further includes performing a first insulation material conversion process on the first insulation material layer and forming a second insulation material layer covering the first insulation material layer in the trench. In addition, a first distance between upper portions of the first protruding structure and the second protruding structure before performing the first insulation material conversion process is different from a second distance between the upper portions of the first protruding structure and the second protruding structure after performing the first insulation material conversion process.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: November 17, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO.. LTD.
    Inventors: Han-Pin Chung, Chih-Tang Peng, Tien-I Bao
  • Patent number: 10629497
    Abstract: A semiconductor device structure and a method for forming the same are provided. The semiconductor device structure includes a first fin structure protruding from the first region of the semiconductor substrate and having a first portion and a second portion over the first portion. The semiconductor device structure also includes a liner structure including a first insulating liner layer and second insulating liner layer. The first insulating liner layer has a bottom portion covering the semiconductor substrate and a sidewall portion covering a sidewall of the first portion of the first fin structure. The second insulating liner layer is over the bottom portion and the sidewall portion of the first insulating liner layer and extends on a top surface of the sidewall portion of the first insulating liner layer. The semiconductor device structure also includes an isolation feature over the liner structure.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: April 21, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Han-Pin Chung, Jian-Shiou Huang
  • Publication number: 20200052081
    Abstract: A method of fabricating a semiconductor device includes forming a plurality of semiconductor fins on a substrate. A liner layer is deposited on the semiconductor fins and on the substrate conformally. The semiconductor fins are patterned to form a plurality of active regions on the substrate after the liner layer is deposited.
    Type: Application
    Filed: August 13, 2018
    Publication date: February 13, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Han-Pin CHUNG
  • Publication number: 20190164848
    Abstract: A semiconductor structure and a method for forming the same are provided. The method includes forming a first insulation material layer in a portion of a trench between a first protruding structure and a second protruding structure over a substrate and performing a pre-treatment process on the first insulation material layer. The method further includes performing a first insulation material conversion process on the first insulation material layer and forming a second insulation material layer covering the first insulation material layer in the trench. In addition, a first distance between upper portions of the first protruding structure and the second protruding structure before performing the first insulation material conversion process is different from a second distance between the upper portions of the first protruding structure and the second protruding structure after performing the first insulation material conversion process.
    Type: Application
    Filed: July 27, 2018
    Publication date: May 30, 2019
    Inventors: Han-Pin CHUNG, Chih-Tang PENG, Tien-I BAO
  • Publication number: 20190131186
    Abstract: A semiconductor device structure and a method for forming the same are provided. The semiconductor device structure includes a first fin structure protruding from the first region of the semiconductor substrate and having a first portion and a second portion over the first portion. The semiconductor device structure also includes a liner structure including a first insulating liner layer and second insulating liner layer. The first insulating liner layer has a bottom portion covering the semiconductor substrate and a sidewall portion covering a sidewall of the first portion of the first fin structure. The second insulating liner layer is over the bottom portion and the sidewall portion of the first insulating liner layer and extends on a top surface of the sidewall portion of the first insulating liner layer. The semiconductor device structure also includes an isolation feature over the liner structure.
    Type: Application
    Filed: February 22, 2018
    Publication date: May 2, 2019
    Inventors: Han-Pin CHUNG, Jian-Shiou HUANG
  • Patent number: 9659776
    Abstract: First and second fins are formed extending from a substrate. A first layer is formed over the first fin. The first layer comprises a first dopant. A portion of the first layer is removed from a tip portion of the first fin. A second layer is formed over the second fin. The second layer comprises a second dopant. One of the first and second dopants is a p-type dopant, and the other of the first and second dopants is an n-type dopant. A portion of the second layer is removed from a tip portion of the second fin. A solid phase diffusion process is performed to diffuse the first dopant into a non-tip portion of the first fin, and to diffuse the second dopant into a non-tip portion of the second fin.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: May 23, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Kai Chen, Tsung-Hung Lee, Han-Pin Chung, Shih-Syuan Huang, Chun-Fu Cheng, Chien-Tai Chan, Kuang-Yuan Hsu, Hsien-Chin Lin, Ka-Hing Fung
  • Publication number: 20160260610
    Abstract: First and second fins are formed extending from a substrate. A first layer is formed over the first fin. The first layer comprises a first dopant. A portion of the first layer is removed from a tip portion of the first fin. A second layer is formed over the second fin. The second layer comprises a second dopant. One of the first and second dopants is a p-type dopant, and the other of the first and second dopants is an n-type dopant. A portion of the second layer is removed from a tip portion of the second fin. A solid phase diffusion process is performed to diffuse the first dopant into a non-tip portion of the first fin, and to diffuse the second dopant into a non-tip portion of the second fin.
    Type: Application
    Filed: May 12, 2016
    Publication date: September 8, 2016
    Inventors: Hung-Kai Chen, Tsung-Hung Lee, Han-Pin Chung, Shih-Syuan Huang, Chun-Fu Cheng, Chien-Tai Chan, Kuang-Yuan Hsu, Hsien-Chin Lin, Ka-Hing Fung
  • Patent number: 9362404
    Abstract: First and second fins are formed extending from a substrate. A first layer is formed over the first fin. The first layer comprises a first dopant. A portion of the first layer is removed from a tip portion of the first fin. A second layer is formed over the second fin. The second layer comprises a second dopant. One of the first and second dopants is a p-type dopant, and the other of the first and second dopants is an n-type dopant. A portion of the second layer is removed from a tip portion of the second fin. A solid phase diffusion process is performed to diffuse the first dopant into a non-tip portion of the first fin, and to diffuse the second dopant into a non-tip portion of the second fin.
    Type: Grant
    Filed: February 21, 2014
    Date of Patent: June 7, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Kai Chen, Tsung-Hung Lee, Han-Pin Chung, Shih-Syuan Huang, Chun-Fu Cheng, Chien-Tai Chan, Kuang-Yuan Hsu, Hsien-Chin Lin, Ka-Hing Fung
  • Patent number: 9218974
    Abstract: An integrated circuit structure includes a first gate strip; a gate spacer on a sidewall of the first gate strip; and a contact etch stop layer (CESL) having a bottom portion lower than a top surface of the gate spacer, wherein a portion of a sidewall of the gate spacer has no CESL formed thereon.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: December 22, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Pin Chung, Bor Chiuan Hsieh, Shiang-Bau Wang, Hun-Jan Tao
  • Publication number: 20150243739
    Abstract: First and second fins are formed extending from a substrate. A first layer is formed over the first fin. The first layer comprises a first dopant. A portion of the first layer is removed from a tip portion of the first fin. A second layer is formed over the second fin. The second layer comprises a second dopant. One of the first and second dopants is a p-type dopant, and the other of the first and second dopants is an n-type dopant. A portion of the second layer is removed from a tip portion of the second fin. A solid phase diffusion process is performed to diffuse the first dopant into a non-tip portion of the first fin, and to diffuse the second dopant into a non-tip portion of the second fin.
    Type: Application
    Filed: February 21, 2014
    Publication date: August 27, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hung-Kai Chen, Tsung-Hung Lee, Han-Pin Chung, Shih-Syuan Huang, Chun-Fu Cheng, Chien-Tai Chan, Kuang-Yuan Hsu, Hsien-Chin Lin, Ka-Hing Fung
  • Patent number: 8999834
    Abstract: An integrated circuit structure includes a first gate strip; a gate spacer on a sidewall of the first gate strip; and a contact etch stop layer (CESL) having a bottom portion lower than a top surface of the gate spacer, wherein a portion of a sidewall of the gate spacer has no CESL formed thereon.
    Type: Grant
    Filed: February 20, 2014
    Date of Patent: April 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Pin Chung, Bor Chiuan Hsieh, Shiang-Bau Wang, Hun-Jan Tao
  • Patent number: 8900957
    Abstract: The present disclosure provides a method of fabricating a semiconductor device that includes forming first and second gate structures over first and second regions of a substrate, respectively, forming spacers on sidewalls of the first and second gate structures, the spacers being formed of a first material, forming a capping layer over the first and second gate structures, the capping layer being formed of a second material different from the first material, forming a protection layer over the second region to protect the second gate structure, removing the capping layer over the first gate structure; removing the protection layer over the second region, epitaxially (epi) growing a semiconductor material on exposed portions of the substrate in the first region, and removing the capping layer over the second gate structure by an etching process that exhibits an etching selectivity of the second material to the first material.
    Type: Grant
    Filed: November 22, 2013
    Date of Patent: December 2, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Pin Chung, Bor Chiuan Hsieh, Shiang-Bau Wang, Ming-Jie Huang
  • Patent number: 8900956
    Abstract: The present disclosure provides a method of fabricating a semiconductor device that includes forming first and second gate structures over first and second regions of a substrate, respectively, forming spacers on sidewalls of the first and second gate structures, the spacers being formed of a first material, forming a capping layer over the first and second gate structures, the capping layer being formed of a second material different from the first material, forming a protection layer over the second region to protect the second gate structure, removing the capping layer over the first gate structure; removing the protection layer over the second region, epitaxially (epi) growing a semiconductor material on exposed portions of the substrate in the first region, and removing the capping layer over the second gate structure by an etching process that exhibits an etching selectivity of the second material to the first material.
    Type: Grant
    Filed: November 22, 2013
    Date of Patent: December 2, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Pin Chung, Bor Chiuan Hsieh, Shiang-Bau Wang, Ming-Jie Huang
  • Publication number: 20140170846
    Abstract: An integrated circuit structure includes a first gate strip; a gate spacer on a sidewall of the first gate strip; and a contact etch stop layer (CESL) having a bottom portion lower than a top surface of the gate spacer, wherein a portion of a sidewall of the gate spacer has no CESL formed thereon.
    Type: Application
    Filed: February 20, 2014
    Publication date: June 19, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Pin Chung, Bor Chiuan Hsieh, Shiang-Bau Wang, Hun-Jan Tao