Patents by Inventor Han-seop CHOE

Han-seop CHOE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEVICE AND METHOD FOR CLEANING BACKSIDE OR EDGE OF WAFER
    Publication number: 20160372317
    Abstract: A wafer back surface cleaning apparatus for removing foreign substance on a back surface of a wafer with a pulse-wave laser beam is disclosed. The wafer back surface cleaning apparatus comprises a rotating unit for rotating the wafer in condition that the outer portion of the back surface of the wafer is exposed; and a laser beam irradiating unit for irradiating a pulse-wave laser beam onto the outer portion of the back surface of the wafer, wherein the pulse-wave laser beam irradiated location on the wafer changes depending on the rotation of the wafer.
    Type: Application
    Filed: August 25, 2014
    Publication date: December 22, 2016
    Inventors: Jong Myoung LEE, Kyu-pil LEE, Han-seop CHOE