Patents by Inventor Han-Shu Lin

Han-Shu Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11968908
    Abstract: In an embodiment, a method includes: forming a first inter-metal dielectric (IMD) layer over a semiconductor substrate; forming a bottom electrode layer over the first IMD layer; forming a magnetic tunnel junction (MTJ) film stack over the bottom electrode layer; forming a first top electrode layer over the MTJ film stack; forming a protective mask covering a first region of the first top electrode layer, a second region of the first top electrode layer being uncovered by the protective mask; forming a second top electrode layer over the protective mask and the first top electrode layer; and patterning the second top electrode layer, the first top electrode layer, the MTJ film stack, the bottom electrode layer, and the first IMD layer with an ion beam etching (IBE) process to form a MRAM cell, where the protective mask is etched during the IBE process.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: April 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tai-Yen Peng, Hui-Hsien Wei, Han-Ting Lin, Sin-Yi Yang, Yu-Shu Chen, An-Shen Chang, Qiang Fu, Chen-Jung Wang
  • Patent number: 11944017
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes an insulation layer. A bottom electrode via is disposed in the insulation layer. The bottom electrode via includes a conductive portion and a capping layer over the conductive portion. A barrier layer surrounds the bottom electrode via. A magnetic tunneling junction (MTJ) is disposed over the bottom electrode via.
    Type: Grant
    Filed: May 5, 2023
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tai-Yen Peng, Yu-Shu Chen, Chien Chung Huang, Sin-Yi Yang, Chen-Jung Wang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
  • Publication number: 20240099150
    Abstract: A method includes forming Magnetic Tunnel Junction (MTJ) stack layers, which includes depositing a bottom electrode layer; depositing a bottom magnetic electrode layer over the bottom electrode layer; depositing a tunnel barrier layer over the bottom magnetic electrode layer; depositing a top magnetic electrode layer over the tunnel barrier layer; and depositing a top electrode layer over the top magnetic electrode layer. The method further includes patterning the MTJ stack layers to form a MTJ; and performing a passivation process on a sidewall of the MTJ to form a protection layer. The passivation process includes reacting sidewall surface portions of the MTJ with a process gas comprising elements selected from the group consisting of oxygen, nitrogen, carbon, and combinations thereof.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Tai-Yen Peng, Yu-Shu Chen, Sin-Yi Yang, Chen-Jung Wang, Chien Chung Huang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
  • Patent number: 10379638
    Abstract: A method of determining an adaptive DPI curve includes the steps of: detecting, by a sensing element, an object on a touch surface and outputting a detected frame; calculating, by a processing unit, a contact range according to the detected frame; and determining a DPI curve according to the contact range.
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: August 13, 2019
    Assignee: PIXART IMAGING INC.
    Inventors: Chi-Chieh Liao, Han-Shu Lin, Tse-Chung Su
  • Publication number: 20180307365
    Abstract: A coordinate detection device including a force detection device and a processor is provided. The force detection device includes a plurality of force sensors arranged in a matrix. Each of the force sensors is configured to output a force signal representing a force value. The processor receives the force signals from the force sensors, and calculates a touch position according to the force signals.
    Type: Application
    Filed: January 23, 2018
    Publication date: October 25, 2018
    Inventors: Yu-Han CHEN, Han-Shu LIN, Yi-Hsien KO
  • Publication number: 20180260066
    Abstract: Provided herein are a sensing device and a control method thereof. The sensing device comprises a control unit, at least one first sensor and at least one fake sensor. The first sensor configured for detecting a touch event and generating a first sensing signal corresponding to an environmental change and an applied touch event, and sending the first sensing signal to the control unit. The fake sensor configured for generating a second sensing signal corresponding to the environmental change, and sending the second sensing signal to the control unit, wherein the control unit compensates the first sensing signal for the environmental change by using the second sensing signal and generates a compensated signal corresponding to the applied touch event. Accordingly, the present invention achieves the result of removing the influence of environmental changes for the sensing device.
    Type: Application
    Filed: March 13, 2017
    Publication date: September 13, 2018
    Inventors: YU-HAN CHEN, HAN-SHU LIN, JUNG-TAI LIN
  • Patent number: 10055054
    Abstract: There is provided a touch display device including a display and a touch control device. The display includes a glass substrate. The touch control device is attached to the glass substrate and includes a touch zone, a fingerprint detection zone and a control circuit. The touch zone includes a matrix of first detecting cells arranged at a first grid distance. The fingerprint detection zone includes a matrix of second detecting cells arranged at a second grid distance. The control circuit is configured to control detection operations of the touch zone and the fingerprint detection zone and to adjust an effective grid distance of the fingerprint detection zone according to a first detected touch position.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: August 21, 2018
    Assignee: PIXART IMAGING INC
    Inventors: Han-Shu Lin, Yi-Hsien Ko
  • Publication number: 20180032206
    Abstract: There is provided a touch display device including a display and a touch control device. The display includes a glass substrate. The touch control device is attached to the glass substrate and includes a touch zone, a fingerprint detection zone and a control circuit. The touch zone includes a matrix of first detecting cells arranged at a first grid distance. The fingerprint detection zone includes a matrix of second detecting cells arranged at a second grid distance. The control circuit is configured to control detection operations of the touch zone and the fingerprint detection zone and to adjust an effective grid distance of the fingerprint detection zone according to a first detected touch position.
    Type: Application
    Filed: October 6, 2017
    Publication date: February 1, 2018
    Inventors: Han-Shu LIN, Yi-Hsien KO
  • Patent number: 9851836
    Abstract: There is provided a touch display device including a display and a touch control device. The display includes a glass substrate. The touch control device is attached to the glass substrate and includes a touch zone, a fingerprint detection zone and a control circuit. The touch zone includes a matrix of first detecting cells arranged at a first grid distance. The fingerprint detection zone includes a matrix of second detecting cells arranged at a second grid distance. The control circuit is configured to control detection operations of the touch zone and the fingerprint detection zone and to adjust an effective grid distance of the fingerprint detection zone according to a first detected touch position.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: December 26, 2017
    Assignee: PIXART IMAGING INC.
    Inventors: Han-Shu Lin, Yi-Hsien Ko
  • Publication number: 20160054844
    Abstract: There is provided a touch display device including a display and a touch control device. The display includes a glass substrate. The touch control device is attached to the glass substrate and includes a touch zone, a fingerprint detection zone and a control circuit. The touch zone includes a matrix of first detecting cells arranged at a first grid distance. The fingerprint detection zone includes a matrix of second detecting cells arranged at a second grid distance. The control circuit is configured to control detection operations of the touch zone and the fingerprint detection zone and to adjust an effective grid distance of the fingerprint detection zone according to a first detected touch position.
    Type: Application
    Filed: June 11, 2015
    Publication date: February 25, 2016
    Inventors: HAN-SHU LIN, YI-HSIEN KO
  • Publication number: 20150205375
    Abstract: A method of determining an adaptive DPI curve includes the steps of: detecting, by a sensing element, an object on a touch surface and outputting a detected frame; calculating, by a processing unit, a contact range according to the detected frame; and determining a DPI curve according to the contact range.
    Type: Application
    Filed: January 9, 2015
    Publication date: July 23, 2015
    Inventors: Chi-Chieh LIAO, Han-Shu LIN, Tse-Chung SU
  • Publication number: 20090160820
    Abstract: The present invention discloses a touch panel with function of preventing fault detection comprising a touch sensor and the outer peripheral area of the touch sensor is configured with at least one electrical lead. The present invention is characterized in having the conductive shield layer configured in a position corresponding to the outer peripheral area for preventing the fault detection by touching the outer peripheral area.
    Type: Application
    Filed: February 18, 2008
    Publication date: June 25, 2009
    Inventors: JIA-YIH LII, Yen-Chang Chiu, Min-Shu Wang, Han-Shu Lin