Patents by Inventor Han Sol LIM

Han Sol LIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE CLEANING COMPOSITION, METHOD FOR CLEANING SUBSTRATE USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20220336206
    Abstract: A substrate cleaning composition, a method of cleaning a substrate using the same, and a method of fabricating a semiconductor device using the same, the substrate cleaning composition including a styrene copolymer including a first repeating unit represented by Formula 1-la and a second repeating unit represented by Formula 1-1b; an additive represented by Formula 2-1; and an alcoholic solvent having a solubility of 500 g/L or less in deionized water,
    Type: Application
    Filed: April 13, 2022
    Publication date: October 20, 2022
    Applicant: DONGJIN SEMICHEM CO., LTD.
    Inventors: Ga Young SONG, Mi Hyun PARK, Jong Kyoung PARK, Jung Youl LEE, Hyun Jin KIM, Hyo San Lee, Han Sol LIM, Hoon HAN