Abstract: A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.

Abstract: A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.

Abstract: A scanner comprises a mirror, a first and second springs, an insulation layer and a first and second piezoelectric elements. The insulation layer is directly attached to the mirror and the first and second springs. The first and second piezoelectric elements are directly attached to the insulation layer. The first piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring. The second piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring. The first piezoelectric element has a first upper electrode layer, a first piezoelectric layer and a first lower electrode layer. The second piezoelectric element has a second upper electrode layer, a second piezoelectric layer and a second lower electrode layer.

Abstract: An electrostatic scanner has a mirror, a first outer slow-scan spring, a second outer slow-scan spring, a plurality of out-of-plane comb assemblies, circuitry for voltage or resistance measurement. Angular positions of a mirror can be determined by changes of resistance of deformed springs located in a leg of the circuitry. The determined angular positions of the mirror can be used for feedback control. The mirror is a one-dimensional mirror to rotate about a first axis or a two-dimensional mirror to rotate about the first axis and a second axis perpendicular to the first axis. In one example, the circuitry is Wheatstone bridge circuitry.

Abstract: A scanner comprises a mirror, a first and second springs, an insulation layer and a first and second piezoelectric elements. The insulation layer is directly attached to the mirror and the first and second springs. The first and second piezoelectric elements are directly attached to the insulation layer. The first piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring. The second piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring. The first piezoelectric element has a first upper electrode layer, a first piezoelectric layer and a first lower electrode layer. The second piezoelectric element has a second upper electrode layer, a second piezoelectric layer and a second lower electrode layer.

Abstract: An electrostatic scanner has a mirror, a first outer slow-scan spring, a second outer slow-scan spring, a plurality of out-of-plane comb assemblies, circuitry for voltage or resistance measurement. Angular positions of a mirror can be determined by changes of resistance of deformed springs located in a leg of the circuitry. The determined angular positions of the mirror can be used for feedback control. The mirror is a one-dimensional mirror to rotate about a first axis or a two-dimensional mirror to rotate about the first axis and a second axis perpendicular to the first axis. In one example, the circuitry is Wheatstone bridge circuitry.

Abstract: An electrostatic scanner is disclosed. The electrostatic scanner comprises a mirror, one or more actuating comb assemblies, one or more sensing comb assemblies and two or more springs. The one or more sensing comb assemblies each have a movable sensing combteeth set, an upper fixed sensing combteeth set and a lower fixed sensing combteeth set. The upper fixed sensing combteeth set and the movable sensing combteeth set form an in-plane comb configuration. The lower fixed sensing combteeth set and the movable sensing combteeth set form a vertical comb configuration. An upper fixed sensing combtooth of the upper fixed sensing combteeth set is shorter than a lower fixed sensing combtooth of the lower fixed sensing combteeth set.

Abstract: In a method for fabricating a self-aligned vertical comb drive structure, a multi-layer structure is first formed. The multi-layer structure includes inter-digitated first and second comb structures formed via etching using a first mask layer as a mask. The first comb structure includes a plurality of first comb fingers, each having a first finger portion formed in a first device layer and a second finger portion formed in a second device layer and separated from the first finger portion by a self-aligned pattern on a stop layer. The second comb structure includes a plurality of second comb fingers formed solely in the second device layer. The second finger portions of the first comb fingers are subsequently removed.

Abstract: In a method for fabricating a self-aligned vertical comb drive structure, a multi-layer structure is first formed. The multi-layer structure includes inter-digitated first and second comb structures formed via etching using a first mask layer as a mask. The first comb structure includes a plurality of first comb fingers, each having a first finger portion formed in a first device layer and a second finger portion formed in a second device layer and separated from the first finger portion by a self-aligned pattern on a stop layer. The second comb structure includes a plurality of second comb fingers formed solely in the second device layer. The second finger portions of the first comb fingers are subsequently removed.