Abstract: A method for defect inspection of a transparent substrate comprises utilizing a wavefront reconstruction unit to obtain complex defect diffraction wavefront of a transparent substrate; using a complex defect diffraction module to confirm the effective diffraction distance of the complex defect diffraction wavefront; utilizing a defect detection module to detect position of the defect of the transparent substrate; using a defect classification module to perform extraction, analysis and classification of diffraction characteristics and utilizing a machine learning algorithm or a deep learning algorithm to automatically identify the defects.

Abstract: A method for defect inspection of a transparent substrate comprises utilizing a wavefront reconstruction unit to obtain complex defect diffraction wavefront of a transparent substrate; using a complex defect diffraction module to confirm the effective diffraction distance of the complex defect diffraction wavefront; utilizing a defect detection module to detect position of the defect of the transparent substrate; using a defect classification module to perform extraction, analysis and classification of diffraction characteristics and utilizing a machine learning algorithm or a deep learning algorithm to automatically identify the defects.

Abstract: A method for digital holographic microtomography comprises (a) providing at least one wavefront controlling device for driving a sample to be rotated and/or an incident beam scanning the sample, (b) utilizing a digital holographic access unit for recording the transmitted or reflected wavefronts of the sample, (c) utilizing a digital holography reconstructing method for reconstructing the transmitted or reflected wavefronts of the sample, and (d) utilizing a tomographic reconstruction approach for reconstructing three dimensional image information of the sample.

Abstract: A method for digital holographic microtomography comprises (a) providing at least one wavefront controlling device for driving a sample to be rotated and/or an incident beam scanning the sample, (b) utilizing a digital holographic access unit for recording the transmitted or reflected wavefronts of the sample, (c) utilizing a digital holography reconstructing method for reconstructing the transmitted or reflected wavefronts of the sample, and (d) utilizing a tomographic reconstruction approach for reconstructing three dimensional image information of the sample.