Abstract: In a method of forming a pattern, a first pattern is formed over an underlying layer, the first pattern including main patterns and a lateral protrusion having a thickness of less than 25% of a thickness of the main patterns, a hard mask layer is formed over the first pattern, a planarization operation is performed to expose the first pattern without exposing the lateral protrusion, a hard mask pattern is formed by removing the first pattern while the lateral protrusion being covered by the hard mask layer, and the underlying layer is patterned using the hard mask pattern as an etching mask.

Abstract: A containing apparatus for volatile liquid includes a container for receiving a volatile liquid, a breathable membrane, a rupturable substrate, an upper casing, and a pressing member. An accommodating portion of the container has a receiving opening. The rupturable substrate covers the receiving opening for retaining the volatile liquid therein without leakage in a non-use state. The breathable membrane is disposed above the rupturable substrate. The upper casing is disposed above the breathable membrane and has a through-hole. The pressing member is movably connected to the upper casing and can be pressed toward the breathable membrane and the rupturable substrate. The breathable membrane is arranged between the pressing member and the rupturable substrate. A part of the pressing member can pass through the through-hole and break the rupturable substrate to form a breaking hole, yet the breathable membrane is not broken.

Abstract: A containing apparatus for volatile liquid includes a container for receiving a volatile liquid, a breathable membrane, a rupturable substrate, an upper casing, and a pressing member. An accommodating portion of the container has a receiving opening. The rupturable substrate covers the receiving opening for retaining the volatile liquid therein without leakage in a non-use state. The breathable membrane is disposed above the rupturable substrate. The upper casing is disposed above the breathable membrane and has a through-hole. The pressing member is movably connected to the upper casing and can be pressed toward the breathable membrane and the rupturable substrate. The breathable membrane is arranged between the pressing member and the rupturable substrate. A part of the pressing member can pass through the through-hole and break the rupturable substrate to form a breaking hole, yet the breathable membrane is not broken.