Patents by Inventor Hana ISHII

Hana ISHII has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230012781
    Abstract: A part includes a base material, a colored layer, an intermediate layer, and a water-repellent-surface layer. The colored layer contains 35 at % to 99 at % of C, 0 at % to less than 40 at % of Cr, 0 at % to less than 15 at % of N, and more than 0 at % to less than 15 at % of O. The intermediate layer contains at least one metal atom selected from Cr, Zr, and Si; and an oxygen atom. The intermediate layer exhibits a sputtering time of 0.
    Type: Application
    Filed: March 1, 2021
    Publication date: January 19, 2023
    Inventors: Yuya SUZUKI, Saori UKIGAI, Hironori HATONO, Atsushi TERAMOTO, Yuichi TAKAMATSU, Hana ISHII
  • Patent number: 10106568
    Abstract: Disclosed are Hafnium-containing film forming compositions comprising Silicon- and Hafnium-containing precursors having one of the following formula: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; or a C1-C5 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing the disclosed compositions and using the same to deposit Hafnium-containing thin films on substrates via vapor deposition processes.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: October 23, 2018
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Christian Dussarrat, Jean-Marc Girard, Hana Ishii, Clément Lansalot-Matras, Julien Lieffrig
  • Patent number: 9868753
    Abstract: Disclosed are Germanium- and Zirconium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; and a C1-C5 linear, branched, or cyclic fluoroalkyl groups. Also disclosed are methods of synthesizing the disclosed precursors and using the same to deposit Zirconium-containing films on substrates via vapor deposition processes.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: January 16, 2018
    Assignee: L'Air Liquide, Société Anonyme our l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Clément Lansalot-Matras, Julien Lieffrig, Hana Ishii, Christian Dussarrat
  • Patent number: 9790591
    Abstract: Titanium-containing film forming compositions are disclosed as well as methods of synthesizing the same and methods of forming Titanium-containing films on substrates via vapor deposition processes using the Titanium-containing film forming compositions. The Titanium-containing film forming compositions comprise a precursor having the formula Ti(R5Cp)2(L), wherein each R is independently H, an alkyl group, or R?3Si, with each R? independently being H or an alkyl group; L is selected from the group consisting of formamidinates (NR,R?-fmd) or amidinates (NR,R?R?-amd).
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: October 17, 2017
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Changhee Ko, Julien Gatineau, Clément Lansalot-Matras, Julien Lieffrig, Hana Ishii
  • Patent number: 9663547
    Abstract: Disclosed are Silicon- and Zirconium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; or a C1-C5 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing the disclosed precursors and using the same to deposit Zirconium-containing thin films on substrates via vapor deposition processes.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: May 30, 2017
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Clement Lansalot-Matras, Julien Lieffrig, Hana Ishii, Christian Dussarrat
  • Publication number: 20170050999
    Abstract: Disclosed are Germanium- and Zirconium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; and a C1-C5 linear, branched, or cyclic fluoroalkyl groups. Also disclosed are methods of synthesizing the disclosed precursors and using the same to deposit Zirconium-containing films on substrates via vapor deposition processes.
    Type: Application
    Filed: October 19, 2016
    Publication date: February 23, 2017
    Inventors: Clément LANSALOT-MATRAS, Julien LIEFFRIG, Hana ISHII, Christian DUSSARRAT
  • Publication number: 20170044199
    Abstract: Disclosed are Hafnium-containing film forming compositions comprising Silicon- and Hafnium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, Fe, R9 and R19 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; or a C1-C5 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing the disclosed compositions and using the same to deposit Hafnium-containing thin films on substrates via vapor deposition processes.
    Type: Application
    Filed: October 28, 2016
    Publication date: February 16, 2017
    Inventors: Christian DUSSARRAT, Jean-Marc GIRARD, Hana ISHII, Clément LANSALOT-MATRAS, Julien LIEFFRIG
  • Publication number: 20170044664
    Abstract: Disclosed are Hafnium-containing film forming compositions comprising Germanium- and Hafnium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; and a C1-C5 linear, branched, or cyclic fluoroalkyl groups. Also disclosed are methods of synthesizing the disclosed compositions and using the same to deposit Hafnium-containing films on substrates via vapor deposition processes.
    Type: Application
    Filed: October 28, 2016
    Publication date: February 16, 2017
    Inventors: Christian DUSSARRAT, Jean-Marc GIRARD, Hana ISHII, Clément LANSALOT-MATRAS, Julien LIEFFRIG
  • Patent number: 9543144
    Abstract: Chalcogenide-containing film forming compositions, methods of synthesizing the same, and methods of forming Chalcogenide-containing films on one or more substrates via vapor deposition processes using the Chalcogenide-containing film forming compositions are disclosed.
    Type: Grant
    Filed: December 31, 2014
    Date of Patent: January 10, 2017
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Hana Ishii, Nathanaelle Schneider, Julien Gatineau
  • Patent number: 9499571
    Abstract: Disclosed are Germanium- and Zirconium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; and a C1-C5 linear, branched, or cyclic fluoroalkyl groups. Also disclosed are methods of synthesizing the disclosed precursors and using the same to deposit Zirconium-containing films on substrates via vapor deposition processes.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: November 22, 2016
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Clement Lansalot-Matras, Julien Lieffrig, Hana Ishii, Christian Dussarrat
  • Publication number: 20160137675
    Abstract: Titanium-containing film forming compositions are disclosed as well as methods of synthesizing the same and methods of forming Titanium-containing films on substrates via vapor deposition processes using the Titanium-containing film forming compositions. The Titanium-containing film forming compositions comprise a precursor having the formula Ti(R5Cp)2(L), wherein each R is independently H, an alkyl group, or R?3Si, with each R? independently being H or an alkyl group; L is selected from the group consisting of formamidinates (NR,R?-fmd) or amidinates (NR, R?-amd).
    Type: Application
    Filed: November 30, 2015
    Publication date: May 19, 2016
    Inventors: Changhee KO, Julien GATINEAU, Clément LANSALOT-MATRAS, Julien LIEFFRIG, Hana ISHII
  • Patent number: 9240319
    Abstract: Disclosed are chalcogenide-containing precursors for use in the manufacture of semiconductor, photovoltaic, LCD-TFT1 or flat panel type devices. Also disclosed are methods of synthesizing the chalcogenide-containing precursors and vapor deposition methods, preferably thermal ALD, using the chalcogenide-containing precursors to form chalcogenide-containing films.
    Type: Grant
    Filed: December 29, 2010
    Date of Patent: January 19, 2016
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Julien Gatineau, Mao Minoura, Hana Ishii
  • Publication number: 20150176120
    Abstract: Disclosed are Silicon- and Zirconium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; or a C1-C5 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing the disclosed precursors and using the same to deposit Zirconium-containing thin films on substrates via vapor deposition processes.
    Type: Application
    Filed: December 23, 2014
    Publication date: June 25, 2015
    Inventors: Clement LANSALOT-MATRAS, Julien LIEFFRIG, Hana ISHII, Christian DUSSARRAT
  • Publication number: 20150111392
    Abstract: Disclosed are Chalcogenide-containing film forming compositions, methods of synthesizing the same, and methods of forming Chalcogenide-containing films on one or more substrates via vapor deposition processes using the Chalcogenide-containing film forming compositions.
    Type: Application
    Filed: December 31, 2014
    Publication date: April 23, 2015
    Inventors: Hana ISHII, Nathanaelle SCHNEIDER, Julien GATINEAU
  • Publication number: 20150110958
    Abstract: Disclosed are Germanium- and Zirconium-containing precursors having one of the following formulae: wherein each R1, R2, R3, R4, R5, R6, R7, R8, R9 and R10 is independently selected from H; a C1-C5 linear, branched, or cyclic alkyl group; and a C1-C5 linear, branched, or cyclic fluoroalkyl groups. Also disclosed are methods of synthesizing the disclosed precursors and using the same to deposit Zirconium-containing films on substrates via vapor deposition processes.
    Type: Application
    Filed: December 23, 2014
    Publication date: April 23, 2015
    Inventors: Clement LANSALOT-MATRAS, Julien LIEFFRIG, Hana ISHII, Christian DUSSARRAT
  • Patent number: 8802194
    Abstract: Methods and compositions for depositing a tellurium-containing film on a substrate are disclosed. A reactor and at least one substrate disposed in the reactor are provided. A tellurium-containing precursor is provided and introduced into the reactor, which is maintained at a temperature ranging from approximately 20° C. to approximately 100° C. Tellurium is deposited on to the substrate through a deposition process to form a thin film on the substrate.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: August 12, 2014
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Hana Ishii, Julien Gatineau
  • Patent number: 8691668
    Abstract: Disclosed are GeX2Ln molecules, with X being a halide, L being an adduct other than C4H8O2, and 0.5?n?2. These molecules have lower melting points and/or increased volatility compared to GeCl2-dioxane. Also disclosed is the use of such molecules for deposition of thin films, such as chalcogenide, SiGe, and GeO2 films.
    Type: Grant
    Filed: September 2, 2010
    Date of Patent: April 8, 2014
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Julien Gatineau, Andreas Zauner, Hana Ishii
  • Publication number: 20130267082
    Abstract: Disclosed are chalcogenide-containing precursors for use in the manufacture of semiconductor, photovoltaic, LCD-TFT1 or fiat panel type devices. Also disclosed a methods of synthesizing the chalcogenide-containing precursors and vapor deposition methods, preferably thermal ALD, using the chaicogenide-containing precursors to form chaicogenide-containing films.
    Type: Application
    Filed: December 29, 2010
    Publication date: October 10, 2013
    Applicant: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Julien Gatineau, Mao Minoura, Hana Ishii
  • Publication number: 20120231611
    Abstract: Disclosed are GeX2Ln molecules, with X being a halide, L being an adduct other than C4H8O2, and 0.5?n?2. These molecules have lower melting points and/or increased volatility compared to GeCl2-dioxane. Also disclosed is the use of such molecules for deposition of thin films, such as chalcogenide, SiGe, and GeO2 films.
    Type: Application
    Filed: September 2, 2010
    Publication date: September 13, 2012
    Applicant: L'Air Liquide Societe Anonyme pour l'Exploitation des Procedes Georges Claude
    Inventors: Julien Gatineau, Andreas Zauner, Hana Ishii
  • Publication number: 20120021590
    Abstract: Methods and compositions for depositing a tellurium-containing film on a substrate are disclosed. A reactor and at least one substrate disposed in the reactor are provided. A tellurium-containing precursor is provided and introduced into the reactor, which is maintained at a temperature ranging from approximately 20° C. to approximately 100° C. Tellurium is deposited on to the substrate through a deposition process to form a thin film on the substrate.
    Type: Application
    Filed: June 24, 2011
    Publication date: January 26, 2012
    Applicant: L'Air Liquide Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude
    Inventors: Hana ISHII, Julien Gatineau