Patents by Inventor Hanam KIM

Hanam KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control method of driving frequency of pulsed variable frequency RF generator
    Patent number: 11244809
    Abstract: A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordingly, impedance matching may be completed at high speed or an optimal frequency may be reached at high speed.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: February 8, 2022
    Assignee: MKS Korea Ltd.
    Inventors: Changhee Lee, Hanam Kim, Jongmin Kim, Jin Huh, Ka Sing Leung
  • Control Method of Driving Frequency of Pulsed Variable Frequency RF Generator
    Publication number: 20210335576
    Abstract: A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordingly, impedance matching may be completed at high speed or an optimal frequency may be reached at high speed.
    Type: Application
    Filed: June 27, 2019
    Publication date: October 28, 2021
    Inventors: Changhee LEE, Hanam KIM, Jongmin KIM, Jin HUH, Ka Sing LEUNG