Abstract: An artificial intelligence (AI) system for wafer defect detection may include a CIS device configured to mount to track equipment and to transmit a scanned image of a wafer to a database; and a server configured to learn the scanned image, to distinguish a defect of the wafer for each defect category, to learn defects that occur in exposure equipment and the track equipment for each type, and to perform real-time monitoring. The server is configured to change a periodic sampling inspection to a total inspection method through the CIS device in response to occurrence of the defect in the wafer.

Abstract: The present disclosure discloses a capacitorless three-dimensional stacked DRAM device including a plurality of memory cell structures spaced apart from each other in horizontal and vertical directions, each of the plurality of memory cell structures including a horizontal read transistor structure and a horizontal write transistor structure, a plurality of write bit lines connected to the plurality of write transistor structures of the plurality of memory cell structures and extending in the horizontal direction, a plurality of read bit lines connected to the plurality of read transistor structures of the plurality of memory cell structures and extending in the horizontal direction, a plurality of write word lines connected to the plurality of write transistor structures and extending in the vertical direction, and a plurality of read word lines connected to the plurality of read transistor structures and extending in the vertical direction.

Abstract: A method for forming patterns includes forming an etch barrier stack where a first sacrificial material, first mask lines, a second sacrificial material and second mask lines intersecting with the first mask lines are sequentially disposed on an etch target material, etching the second an first sacrificial materials using the second and first mask lines as etch masks, to form island-shaped sacrificial openings isolated from one another in the first sacrificial material, forming island-shaped sacrificial pillars to fill the island-shaped sacrificial openings, etching the first mask lines to form island-shaped masks at intersections between the first mask lines and the second mask lines, and etching the first sacrificial material using the island-shaped masks and the island-shaped sacrificial pillars as etch masks, to form a sacrificial barrier including island-shaped openings isolated from one another to expose the etch target material.

Abstract: A method for forming patterns includes forming an etch barrier stack where a first sacrificial material, first mask lines, a second sacrificial material and second mask lines intersecting with the first mask lines are sequentially disposed on an etch target material, etching the second an first sacrificial materials using the second and first mask lines as etch masks, to form island-shaped sacrificial openings isolated from one another in the first sacrificial material, forming island-shaped sacrificial pillars to fill the island-shaped sacrificial openings, etching the first mask lines to form island-shaped masks at intersections between the first mask lines and the second mask lines, and etching the first sacrificial material using the island-shaped masks and the island-shaped sacrificial pillars as etch masks, to form a sacrificial barrier including island-shaped openings isolated from one another to expose the etch target material.

Abstract: A topographer for mapping the central portion as well as the peripheral portion of the corneal surface is disclosed. The topographer includes a chart image generating part for producing a chart image to fixate the gaze of an eye under test; a measuring light source for projecting concentric ring-shaped measuring lights to the cornea of the eye; a light detector for detecting the image of the measuring light reflected from the cornea; and a vertex measuring optical system.

Abstract: A topographer for mapping the central portion as well as the peripheral portion of the corneal surface is disclosed. The topographer includes a chart image generating part for producing a chart image to fixate the gaze of an eye under test; a measuring light source for projecting concentric ring-shaped measuring lights to the cornea of the eye; a light detector for detecting the image of the measuring light reflected from the cornea; and a vertex measuring optical system.

Abstract: A magnetic tape cassette of the type allowing insertion and removal of a pair of tape reels without having to disassemble the cassette, comprising: a hollow housing capable of removably accommodating the tape reels, the housing having at least one access opening permitting the insertion and removal of the tape reels into and out of the housing therethrough; and at least one openable closure member hingedly connected to the housing to close the access opening.