Abstract: Provided is a substrate processing apparatus including a chamber defining a substrate processing space, a supporting plate inside the chamber and comprising an upper surface configured to seat a substrate, a temperature controlling plate facing at least a portion of the supporting plate, and at least one electrochromic module at the temperature controlling plate, and configured to change light transmittance depending on applied electrical energy.

Abstract: A semiconductor process equipment may include a chamber including a viewport, a light source configured to generate light, a light path controller configured to direct the light into the chamber through the viewport at a target height and a target incidence angle, and receive reflected light through the viewport when the light is reflected by an interior surface of the chamber, and a detector configured to detect spectral characteristics of the reflected light, and measure a radical concentration in the chamber along an optical path of the light and the reflected light based on the detected spectral characteristics.

Abstract: A dry cleaning apparatus may include a cleaning chamber, at least two dry cleaning modules, and a power supply. The at least two dry cleaning modules may be stacked in the cleaning chamber and configured to separately dry clean at least two substrates at the same time. The power supply may supply power individually to the at least two dry cleaning modules to generate plasma for dry cleaning each of the at least two substrates. Thus, the dry cleaning modules may receive independent power from the power supply so that each of the substrates may be drying cleaned under the same conditions. As a result, the time to clean the boards is significantly reduced, which may improve the productivity of semiconductor devices.

Abstract: An emergency reporting device comprises a location detecting unit configured to detect a current location of the device; a message generating unit configured to generate an emergency reporting message to indicate an emergency in an event of the emergency; a translating unit configured to determine a transmission language of the message based on the detected location, and to translate the message to a version of the determined language; and a transmission management unit configured to select an emergency reporting contact number based on the detected location and to transmit the version of the determined language using the selected emergency reporting contact number.