Patents by Inventor Hans-Arthur Boesser

Hans-Arthur Boesser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coordinate measuring device
    Publication number: 20070046949
    Abstract: The present invention relates to a reference-beam interferometer for determining the position of a traversable stage, wherein an evacuated tube is inserted into the longer of the two interferometer legs. The tube is closed off by windows, which have a negative coefficient of thermal expansion and which can have a coating for reflecting heat radiation. Moreover, thermal compensation plates are inserted into the shorter of the two beam paths.
    Type: Application
    Filed: August 25, 2006
    Publication date: March 1, 2007
    Applicant: VISTEC SEMICONDUCTOR SYSTEMS GMBH
    Inventors: Michael Heiden, Hans-Arthur Boesser