Abstract: A sensor and detection system is included. The sensor includes at least one transmitter which has associated optical elements for emitting at least one light beam toward the object to be detected. At least one receiver is positioned adjacent the transmitter for receiving light reflected from an edge of the object. The receiver generates a signal responsive to the reflected light. The associated optical elements of the transmitter include a converging lens for emitting a focused light beam in one plane, and a cylindrical lens for emitting a diverging light beam in another plane, such that a portion of the reflected light is diverging and is received by the receiver over a wide angle of coverage.

Abstract: An optical measuring system capable of high resolution measurement of objects, and a method of measuring the same, are provided. The optical measuring system is formed in one integral, portable unit, and includes a laser source having associated optics for emitting a wide collimated light beam. A CCD receiver and a processor housed together and spaced apart from the laser source receive the wide collimated light beam. The CCD receiver has a plurality of diode cells, or “pixels,” formed in a linear array, and the diode cells exhibit output signals corresponding to the received light beam. The processor processes the output signals and determines a measurement associated with the output signals.

Abstract: A sensor and detection system is included. The sensor includes at least one transmitter which has associated optical elements for emitting at least one light beam toward the object to be detected. At least one receiver is positioned adjacent the transmitter for receiving light reflected from an edge of the object. The receiver generates a signal responsive to the reflected light. The associated optical elements of the transmitter include a converging lens for emitting a focused light beam in one plane, and a cylindrical lens for emitting a diverging light beam in another plane, such that a portion of the reflected light is diverging and is received by the receiver over a wide angle of coverage.

Abstract: A semiconductor wafer and magnetic disk edge detection system having a sensor unit comprising a dual beam light source spatially oriented so that the beams focus and converge at a single point external to the sensor unit, and dual light detectors spatially oriented to allow detection of light reflected from the edges of the wafers and disks even where the angle of incidence of the light onto the edge deviates significantly from the perpendicular. The sensor unit works in operative combination with a scanning motion means to move the sensor across the edges of the wafers or disks to be detected, typically by attachment of the sensor unit to a linear motor or a robotic arm, or alternately, by manually detecting the edges of the wafers and disks.