Patents by Inventor Hans-Gerd Busmann

Hans-Gerd Busmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
    Patent number: 6811612
    Abstract: MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.
    Type: Grant
    Filed: November 8, 2002
    Date of Patent: November 2, 2004
    Assignee: The University of Chicago
    Inventors: Dieter M. Gruen, Hans-Gerd Busmann, Eva-Maria Meyer, Orlando Auciello, Alan R. Krauss
  • PATTERNING OF NANOCRYSTALLINE DIAMOND FILMS FOR DIAMOND MICROSTRUCTURES USEFUL IN MEMS AND OTHER DEVICES
    Publication number: 20040129202
    Abstract: MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron. The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.
    Type: Application
    Filed: November 8, 2002
    Publication date: July 8, 2004
    Inventors: Dieter M. Gruen, Hans-Gerd Busmann, Eva-Maria Meyer, Orlando Auciello, Alan R. Krauss, Julie R. Krauss