Patents by Inventor Hans Hauger

Hans Hauger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR TREATING AT LEAST ONE SUBSTRATE IN A LIQUID MEDIUM
    Publication number: 20150083171
    Abstract: A method for treating at least one substrate (15), particularly wafers, in a liquid medium (3). In a first step, the substrate (15) is lifted in the liquid medium (3) until the substrate (15) is at least partially lifted out of the liquid medium (3) and, in a second step, is passed on at least one point protruding out of the liquid medium (3).
    Type: Application
    Filed: April 26, 2013
    Publication date: March 26, 2015
    Applicant: AWT ADVANCED WET TECHNOLOGIES GMBH
    Inventors: Hans Hauger, Werner Schulz