Abstract: A method for producing height images of technical surfaces with microscopic resolution uses a confocal measuring microspace. The sample to be measured is displaced in the direction (Z direction) towards the microspace in a controlled manner and images are produced at defined distances with a digital camera. The digitized images recorded are transmitted to a controller (PC) for further processing and evaluation and the light intensity maximum for every pixel is detected, the position of the maximum indicating the height of the sample to be measured. The sample is displaced in a continuous manner and that the image exposures are triggered at discrete localized distances. The intensities of the N individual images recorded and digitized in the above manner are stored in the PC in such a manner that a number N of subsequent storage locations is occupied for every pixel.

Abstract: The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.

Abstract: The invention relates to a method for producing height images of technical surfaces with microscopic resolution using a confocal measuring microscope. According to said method, the sample to be measured is displaced in the direction (Z direction) towards the microscope in a controlled manner and images are produced a defined distances with a digital camera. The digitized images recorded are transmitted to a controller (PC) for further processing and evaluation and the light intensity maximum for every pixel is detected, the position of the maximum indicating the height of the sample to be measured. The inventive method is further characterized in that the sample is displaced in a continuous manner and that the image exposures are triggered at discrete localized distances.

Abstract: The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.

Abstract: The invention relates to a method and device used for the digital detection of transparent and opaque documents, comprising a CCD pick-up element, a document holder, an illuminating device and elements for covering the edges (masking unit) of the documents. The method comprises the following steps: a) placing the document on the document holder; b) determining the size of the document; c) automatically adjusting a zoom objective, assigned to the scanner, in relation to the document; d) automatically adjusting the masking to the document size; e) beginning the exposure process; f) automatically adjusting the illumination by determining the dynamic range of the image intensity; g) exposing the CCD chip in the camera (one shot); h) memorizing the digitized data in a PC memory; i) further processing the memorized data in the PC or in an external data processing installation.

Abstract: The invention relates to a method for microscoping an object with a (phase-measurement) interference microscope with extremely high resolution, in which the light beam of a light source is divided into at least two coherent part beams, of which at least one serves for illuminating the object, and whereby the part beams are interferingly combined again and supplied to an interference figure detector screened into image zones, for achieving a resolution beyond the diffraction limit. Furthermore, the invention relates to an interference microscope, preferably for carrying out the above method.