Patents by Inventor Hans-Jürgen Kruwinus

Hans-Jürgen Kruwinus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for treating semiconductor substrates
    Patent number: 6627548
    Abstract: The invention relates to a process for treating semiconductor substrates in which metal layers are exposed by removing one or more layers of the surface of a semiconductor substrate which have been applied to the metal layer, in which exposure takes place in a time sequence to a first part of the layer by a dry etching step and to a second part of the layer by a wet etching step.
    Type: Grant
    Filed: July 17, 2000
    Date of Patent: September 30, 2003
    Assignees: SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG, Infineon Technologies AG
    Inventors: Hans-Jürgen Kruwinus, Geert De Nijs