Abstract: An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.

Abstract: An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.

Abstract: An automatic ball bar for a coordinate measuring machine determines the accuracy of a coordinate measuring machine having at least one servo drive. The apparatus comprises a first and second gauge ball connected by a telescoping rigid member. The rigid member includes a switch such that inward radial movement of the second gauge ball relative to the first gauge ball causes activation of the switch. The first gauge ball is secured in a first magnetic socket assembly in order to maintain the first gauge ball at a fixed location with respect to the coordinate measuring machine. A second magnetic socket assembly secures the second gauge ball to the arm or probe holder of the coordinate measuring machine. The second gauge ball is then directed by the coordinate measuring machine to move radially inward from a point just beyond the length of the ball bar until the switch is activated.

Abstract: A non-contact, omni-directional capacitive probe for use in dimensional gauging includes an electrically conductive spherical sensing tip that forms a capacitor with a workpiece, the capacitance of the capacitor being indicative of the distance between the spherical sensing tip and the workpiece.

Abstract: A dynamic seal is disclosed which prevents foreign material from entering the air bearing for a rotor apparatus. The rotor apparatus includes a housing, a generally cylindrical rotor disposed within the housing and having a shoulder, a fluid stream and a flexible seal plate with an inner wall forming a generally circular hole. The seal plate is secured to the housing with the seal plate inner wall normally abutting the shoulder of the rotor. In operation, the fluid stream is directed in the bearing space defined by the housing and exterior surface of the rotor and displaces the seal plate inner wall from the shoulder. A method for preventing foreign material from entering the bearing space defined by a housing and the exterior surface of a generally cylindrical rotor is also disclosed. The method comprises securing a flexible seal plate to the housing, with the seal plate having an inner wall forming a generally circular hole that normally abuts a shoulder portion of the rotor.