Abstract: An xy-surface drive of limited .phi.-rotation and z-movement, has three box coils, positioned at mutual angles of 120.degree., the coils being mechanically connected to each other, and guided in the working air-gap of the magnet ring segment system such that when current flows through the coils, there a power or momentum results, which moves and/or rotates the coil arrangement which, by means of an electrodynamic system, is deflectably connected in z-direction to the object support only via a plate spring. The coil arrangement is connected to an incremental x-y-.phi.-measured value indicator, so that a position control connects the coils according to the deviation to the voltage sources of various polarity, so that the ideal position is attained. The z-position is optimized via an analyzer of object sharpness and a position control.