Patents by Inventor Hans-Jurgen Brueck

Hans-Jurgen Brueck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for measuring feature widths on masks for the semiconductor industry
    Patent number: 7375792
    Abstract: An apparatus for measuring feature widths on masks 1 for the semiconductor industry is disclosed. The apparatus encompasses a carrier plate 16 that is retained in vibrationally decoupled fashion in a base frame 14; a scanning stage 18, arranged on the carrier plate 16, that carries a mask 1 to be measured, the mask 1 defining a surface 4; and an objective 2 arranged opposite the mask 1. A liquid 25 is provided between the objective 2 and the surface 4 of the mask 1.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: May 20, 2008
    Assignees: Leica Microsystems Semiconductor GmbH, MueTec Automatisierta Mikroskopie und Messtechnik GmbH
    Inventors: Wolfgang Vollrath, Frank Hillmann, Gerd Scheuring, Hans-Jürgen Brueck
  • APPARATUS FOR MEASURING FEATURE WIDTHS ON MASKS FOR THE SEMICONDUCTOR INDUSTRY
    Publication number: 20050084770
    Abstract: An apparatus for measuring feature widths on masks 1 for the semiconductor industry is disclosed. The apparatus encompasses a carrier plate 16 that is retained in vibrationally decoupled fashion in a base frame 14; a scanning stage 18, arranged on the carrier plate 16, that carries a mask 1 to be measured, the mask 1 defining a surface 4; and an objective 2 arranged opposite the mask 1. A liquid 25 is provided between the objective 2 and the surface 4 of the mask 1.
    Type: Application
    Filed: September 17, 2004
    Publication date: April 21, 2005
    Applicant: LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
    Inventors: Wolfgang Vollrath, Frank Hillmann, Gerd Scheuring, Hans-Jurgen Brueck