Abstract: The invention relates to a cryopump having pump surfaces which are held at different temperatures during operation and are disposed in a housing with a flange for connecting the housing to a vacuum chamber. Additional pump surfaces are provided for the accumulation of easily condensable gases and improve the suction performance of the cryopump. These additional pump surfaces are disposed in the vacuum chamber and are connected to a first stage of a two stage refrigeration head via a cold bridge.

Abstract: The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed.

Abstract: The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.