Patents by Inventor Hans Kattouw

Hans Kattouw has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070181827
    Abstract: Calibration of spot height offsets in a level sensor is performed on a resist-coated substrate to eliminate process dependencies of substrate position measurements obtained by the level sensor.
    Type: Application
    Filed: February 7, 2006
    Publication date: August 9, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jeffrey Godefridus Tempelaars, Gerardus Carolus Hofmans, Rene Oesterholt, Jan Hauschild, Hans Kattouw