Abstract: A laser discharge unit is provided. The discharge unit includes an elongated electrode plate, an elongated high voltage electrode, and an elongated ground electrode. Both the high voltage electrode and the ground electrode are mounted to the electrode plate in a spaced-apart relationship with their longitudinal axis being substantially parallel to thereby define a gas discharge gap between the electrodes. The gas laser discharge unit may be removably mounted as a module into a gas laser such as an excimer laser.

Abstract: An optical element holding and extraction device is provided. The device includes an optical element, an optical element holder having a tubular gripping portion and a tubular extraction portion connected at one end to the tubular gripping portion, and a retainer that is slideably carried on the tubular extraction portion. The diameter of the tubular extraction portion is less than the tubular gripping portion. In addition, the tubular gripping portion grips the peripheral edge of the optical clement. The device may be used in a variety of gas lasers, including excimer lasers.

Abstract: A gas laser and a dedusting unit thereof are provided. The gas laser comprises a tube containing a gas mixture including a laser gas and preferably a buffer gas. The tube preferably comprises a cylindrical inner wall. A discharge unit is inserted into the tube and has two elongated electrodes defining an electrical gas discharge gap therebetween for providing an electric gas discharge between said electrodes to generate laser light. A circulation means is included in the tube for generating a gas flow within the tube that passes through the discharge gap. A dedusting unit is mounted along the inner cylindrical wall of the tube in such a manner that only a bypass flow which is a part of the gas flow within the tube passes through the dedusting unit.

Abstract: A gas laser discharge unit is provided. The discharge unit includes an elongated electrode plate having a plurality of spaced-apart holes therein and a plurality of coaxial high voltage ducts. Each duct extends through one of the holes in the electrode plate and includes a central conductive core and an insulator element arranged around the core to electrically insulate said core from the electrode plate. An elongated high voltage electrode is electrically connected to the cores of the ducts. In addition, an elongated ground electrode is positioned to oppose the high voltage electrode and form a gas discharge gap therebetween. The ground electrode is electrically connected to the electrode plate. The gas laser discharge unit may be removably mounted as a module into a gas laser tube, such as an excimer laser tube.

Abstract: An adjustable mounting unit for an optical element of a gas laser is provided. The typical gas laser for which the mounting unit will be used comprises a tube having a first end wall at one end and a second end wall at the other end, an optical axis extending longitudinally through the tube, and a port in the first end wall through which the optical axis passes. The mounting unit includes a rigid support structure having an aperture therein and an optical element mounted within the aperture. In addition, at least three adjustable mounting devices are used to attach the support structure to the laser tube. The mounting points are preferably selected so that they are displaced in an axial direction by substantially the same amount due to dimensional changes in the laser occurring during operation of the laser. When attached to the laser, the rigid support is spaced apart from the laser tube to allow for the adjustment of the angular positioning of the optical element.

Abstract: An electrode arrangement for a gas laser is provided. The electrode arrangement includes an elongated high voltage electrode, an elongated ground electrode disposed adjacent to the high voltage electrode, a discharge gap between the two electrodes an insulator element, a high voltage conductor having a first end connected to the high voltage electrode and extending through the insulator element, and a shadow plate interposed between the discharge gap and the insulator element. The electrode arrangement may be employed in a variety of gas lasers, including excimer lasers.

Abstract: The present invention relates to a coupling device for feeding a laser beam 66 into at least one optical fiber 12, in particular an optical wave-guide, including a fiber coupler 18 for accommodating said fiber 12, and an optical device 94 for deflecting, adjusting and directing said laser beam 66 towards one end 14 of said fiber 12, with said fiber coupler 18 being provided within said coupling device 10 such that it can be slid vertically and horizontally in the x-y directions, and with said optical device 94 including an optical bank 96 with at least two optical components 58, 62, said optical bank 96 being connected to said fiber coupler 18 via a coupling element 32 provided at the end of said optical bank 96 which is opposite the entry site of said laser beam 66.